New Laser Voltage Signal Insights from EOFM Simulations and Measurements on different pn-junctions

We present various results of electro-optical frequency mapping (EOFM) simulations and experiments on different pn-junctions. The results give detailed insight into EOFM signal causes (also parasitic) present in modern ICs, Over 350 EOFM simulations draw a precise quantitative picture of EOFM signal dependence on temperature, doping levels, voltage and laser bandwidth. Additional analysis of the reflected laser-light allows for an estimation and improvement of EOFM signal quality dependent on substrate thickness and interference pattern.