A Miniature Electromagnetic Bandgap Structure Using Integrated Fan-Out Wafer-Level Package (InFO-WLP) for Gigahertz Noise Suppression

This work presents a periodic electromagnetic bandgap (EBG) structure in integrated fan-out wafer-level package (InFO-WLP) technology for GHz-band noise suppression. The proposed EBG structure consists of an LC resonator with two symmetrical spiral inductors in series and a shunt MIM capacitor between power and ground planes. The EBG arrays with different sizes of unit cell, and the corresponding stopband bandwidth and isolation were characterized. The measurement results show the proposed 1×4 EBG array of 600 μm square unit cell can achieve a 29.5 GHz stopband bandwidth together with an over 30 dB isolation level.