CuO and CuO/TiO2-y Thin-Film Gas Sensors of H2 and NO2

Thin films of CuO and CuO/TiO
₂
were deposited by medium frequency magnetron sputtering on a variety of substrates for the purposes of gas sensing applications. Film characterization was performed by means of X-ray diffraction, XRD, scanning electron microscopy, SEM, and optical spectrophotometry. Gas sensing measurements were carried out in NO
₂
and H
₂
atmosphere at constant temperature chosen within the range of 200-400°C. Improvement in sensor response has been observed for CuO/TiO
₂
thin film heterostructures.