Measurement and simulation of MEMS dedicated to investigation of heat transfer at nanoscale

Nanoscale heat transfer phenomena are supposed not to obey the classic Fourier heat transfer theory. Therefore, in order to verify this hypothesis, MEMS structures with 100 nm-thin cavities filled with different dielectrics were designed and manufactured. These structures include thin platinum resistors located over and under the cavities. The resistors might serve either as heat sources or temperature sensors. This paper presents in detail the results of MEMS test structure dynamic thermal simulations and analyses as well as their preliminary measurements, which are used to validate basic theoretical concepts for the investigation of non-Fourier effects in electronic structures.