Control of the preresonance frequencies range width of the medical electro-magnetic MEMS-scanner at the design stage

The application of MEMS scanners in medicine, especially in the methods of treatment, is considered. A review of existing types of scanners has been performed. According to a set of signs, the best performance is determined by electro-magnetic MEMS scanners. To expand the working area of the electro-magnetic scanners, a mathematical model is constructed, an expression found for the resonance frequency, which depends on the design parameters. Conclusions are made regarding the desired changes in design parameters for obtaining the best performance of the scanner.