Noise analysis of the triaxial piezoelectric micro-accelerometer

Noise is a major factor that constrains the performance improvement of piezoelectric micro-accelerometer in dealing with weak signals. This paper studies the noise source of piezoelectric accelerometer, which is based on theory and characteristics of noise. The background noise of the piezoelectric micro-accelerometer is composed of the mechanical thermal noise and the piezoelectric element noise. The mechanical thermal noise and noise of the piezoelectric element are modeled by the theory of thermodynamics and the noise characteristics of the integrated circuit. By modeling, analysis and calculation, it can be obtained the noise value of the mechanical thermal and the piezoelectric element are 1.53×10
^-2
μg/
^1/2
and 3.6×10
^-2
μg/f
^1/2
respectively.