A 2.1ps RMS Jitter MEMS-based temperature stable timing device with single point calibration temperature sensor

This paper presents a MEMS-based temperature stable timing device with single point calibration temperature sensor in 0.18 μm CMOS process. The timing device could generate 1 MHz to 100 MHz output with 1ppm resolution. The frequency stability with temperature variation (from −20°C to 70°C) within 3 ppm. The RMS jitter is 2.2 ps at 76 MHz. The active chip die area of ASIC is 2 mm × 1.8 mm. The MEMS timing device could be functional with supply voltage from 1.8 V to 3.6 V. The core timing device consumes 5 mA current.