A novel MEMS-based integrated current and voltage sensor

This paper presents a novel MEMS-based integrated current and voltage sensor for the measurement of voltage and current in power distribution networks. It adopts three-dimensional (3D) induction coil as current sensor and two asymmetric sensing electrodes as voltage sensor to detect voltage and current simultaneously. A micromachining fabrication process is proposed to fabricate the integrated current and voltage sensor. The proposed sensor has the advantages of small size, low power consumption and convenience for installation. Experimental results show that in the current range of 0~60A, the linearity errors of sensor are within 0.58%; in the voltage range of 0~1.2kV, the linearity errors of sensor are within 0.30%.