A micro-casting method for solenoid coil fabrication

Solenoid coil is a very important structure in micro-electronic filed. In this paper, we for the first time present a method that can fabricate solenoid coil by casting. The named micro-casting method is like macro-scale casting, however micro-scale liquid phenomena is introduced as a gating system to overcome high surface-tension. Together with silicon bulk micromachining, integrated solenoid coils can be fabricated in batch and on single-stage forming by the micro-casting method. Therefore, in addition to wire-bonding and electroplating, the micro-casting method provide an additional way to fabricate solenoid coil on wafer-level.