Development of a Full Metal Seal Low Energy Ion Source

We have developed a full metal seal compact ion source for the evaluation of the beam transport line. Positive ions of argon have been extracted from a compact full metal seal ion source of 55 mm diameter, 57 mm long inside volume. The argon ion beam current density was reached 0.18 mA/cm
²
by changing the discharge current for source operating gas pressure above 69×10
^-9
Torr with 90 V discharge voltage, 500 V extraction voltage, 2×10
^-8
Torr base pressure. The Mg/As overlayer on Ag/Mo test targets exhibited characteristics angular distribution of reflection upon injection of 500 V argon ion beam. Broader angular distributions were observed for As deposited on Ag test target compared with that of the intrinsic Ag and, narrower angular distributions were observed for Mg deposited on Mo test target compared with that of the intrinsic Mo.