Modernization of the installation of high-frequency vacuum evaporator for growing piezoelectric nanostructure films of dielectrics

The practical part of the work on the modernization of the industrial plant of high-frequency sputtering. The author's task was put to create a universal test bench with the possibility of a wide variation of sprayed materials. The versatility of the installation is the possibility of growing films of metals and dielectrics using the same sputtering target. The design of the experimental setup provides the ability to quickly change the reactive gas and spray material. Finally I got the opportunity on the basis of one plant to grow a lot of nanostructured films of metals and dielectrics, including piezo-active oriented films for the needs akustooptoelektroniki.