A study on the double-beam laser scribing process for CIGS thin film solar cells

The finite element method has been employed to simulate the double-beam laser scribing on the Pattern 1 process of CuInGaSe
2
-based thin film solar cells (CIGS). The advantages of high concentrated power and manufacturing accuracy of laser beam have been used to remove the Mo thin film on the substrate. The thermal-elastic-plastic finite element models in company with temperature dependent material properties are applied to characterize the heating process during the laser scribing. The effects of laser scribing parameters, e.g. power, scribing speed, and the distance of two lasers, on the single-beam and double-beam laser scribing of Pattern 1 process are also studied in this work respectively. Three double-beam laser scribing processes with different speed have been proposed and investigated. The temperature and thermal stress distributions around the vaporizing pools during the scribing process have been simulated and studied. The distributions of residual stress induced in this scribing process have also been studied by employed the inactive elements method in MARC software.