Modeling of the effect of substrate temperature on Na diffusion through molybdenum films

In this study, Mo thin films were deposited on soda lime glass substrates at various temperatures using direct-current magnetron sputtering to observe the influence of substrate temperature (Tss) on Na diffusion. Tss was varied from room temperature to 200 °C. Structural analyses of the as deposited films were performed using scanning electron microscopy, atomic force microscopy and reflection measurements, while secondary ion mass spectroscopy measurements were carried out to obtain Na depth profile. Both theoretical and numerical models were used for simulating and understanding grain boundary diffusion mechanism for Na through Mo films as a function of substrate temperature.