High pressure check valve for application in a miniature cryogenic sorption cooler

This paper presents a check valve with integrated filter that can stand gas pressures of more than 100 bar in the closed direction and which has a very low pressure drop at low absolute gas pressures in the forward direction. The check valve is designed as a part of a check valve unit for application In a miniature cooler for cryogenic temperatures (<120 K). This cooling system, which utilizes several micromachined components, will in this paper be introduced to the MEMS field.