Analysis of the development of smart sensors based on MEMS devices and smart sensor platform proposal

In this paper we present the state of the art in the development of smart sensors based on MEMS (Micro-Electro-Mechanical Systems), where we will explain its evolution from the beginning until the latest generation of smart sensors, deepening in architecture and operational philosophy. It also presents an analysis of the future prospects of the new designs that could satisfy the demands of the current and future markets. We aim to provide an overview describing their development and the way in which it will increase the capabilities of many control and instrumentation systems, allowing you to convert a passive sensor into an smart sensor. We will consider the most important features that should have in the future to be used in the automotive industry, communications, military, medical, environmental and consumer electronics products. It is also proposed the development of a platform based on a microcontroller with an algorithm to estimate the reliability in real time of MEMS sensors.