A Compact Fourier Transform Spectrometer on a Silicon Optical Bench With an Electrothermal MEMS Mirror

This paper reports a compact Fourier transform spectrometer system with a large-stroke electrothermal microelectromechanical systems (MEMS) mirror and other optical components all integrated on a micromachined silicon optical bench with the footprint of 2 cm × 2 cm. The linear optical path difference (OPD) scan range generated by the MEMS mirror reaches up to 450 μm, and the tilting of the mirror plate is reduced down to <;±0.002° by using a new openloop control method. A spectral resolution of 40 cm
^-1
, or 1.1 nm at 532 nm, has been achieved. The overall size of the system is reduced dramatically and the performance is improved significantly compared with the prior work.