Operating principle verification and scaling benefits of SGLC eNVM

Nowadays, in the interests of the system on chip (SoC) trend of many applications, the importance of embedded flash memory has increased more than ever. However, the more a technology node shrinks, the more difficult and delayed the production of embedded NVM (eNVM) becomes compared to the previous larger geometry technology [1]. Therefore, as the technology node becomes smaller, the demand for no additional process steps single poly NVM has increased, especially for foundry and fabless companies.