Fully monolithic and ultra-compact NEMS-CMOS self-oscillator based-on single-crystal silicon resonators and low-cost CMOS circuitry

We report on the first experimental demonstration of a self-oscillator based on a single-crystal silicon NEMS resonator monolithically co-integrated with a CMOS circuitry. The latter, composed only by seven transistors, is manufactured with a very low-cost 0.35μm technology. The NEMS-CMOS self-oscillator pixel is as small as 50×70 μm
²
(pads excluded) and can oscillate near 8MHz. In this paper are described the NEMS-CMOS oscillator characteristics and the implementation method of the self-oscillating loop.