1.3-$\mu$ m Two-Section DBR Lasers Based on Surface Defined Gratings for High-Speed Telecommunication

InP-based two-section distributed Bragg reflector lasers employing surface defined lateral gratings, which are compatible with low-cost nanoimprint technology, were fabricated. A newly developed inductively coupled plasma reactive ion etching process was utilized for obtaining large aspect ratios and good device performance. The lasers operate in a single mode up to 50
$^{\circ}\hbox{C}$
under continuous-wave conditions. A modulation bandwidth of about 10 GHz was obtained for 0.9-mm-long devices.