Charge Enhancement Effects in 6H-SiC MOSFETs Induced by Heavy Ion Strike

The transient response of Silicon Carbide (SiC) Metal-Oxide-Semiconductor Field Effect Transistors (MOSFETs) with three different gates due to a single ion strike is studied. Comparing the experiment and numerical simulation, it is suggested that the charge enhancement is due to the bipolar effect. We find the bipolar gain depends on the quality of gate oxide. The impact of fixed charge in SiO
₂
and interface traps at SiC/SiO
₂
on the charge collection is discussed.