Electromagnetic micro generator array consisting of 3D micro coils opposing a magnetic PDMS membrane

This work describes the fabrication and characterization of an electromagnetic micro generator array for energy harvesting purposes. The array consists of a magnetic polydimethylsiloxane (PDMS) membrane with 3x3 magnets which is aligned over a PCB with 3x3 coils. Different coil cores are tested and compared. The parameter for comparison is the voltage induced in the coil array by the vibrating membrane. The maximum measured voltage is 1.2 mV when exciting the converter array with an acceleration of 60 m/s
²
.