A micro silicon hot-wire anemometer

A new micromachined hot-wire anemometer has been developed. Extensive tests of the anemometer's dependence on ambient temperature, over-heat ratio, and sensor length have been finalized. Due to its extremely small size, micromachined hot-wire has better sensitivity, temporal and spatial resolutions than the conventional hot-wire. Because of the large bandwidth (MHz), velocity fluctuations at high Reynolds number flow can be measured.