New high density micro structured thermogenerators for stand alone sensor systems

Thermoelectric thin film micro-devices with high packing densities of thermoelectric legs are of high demand in micro-systems for self-standing and so called waste energy self-powered sensor systems for wireless data transfer. One technical solution for such micro-devices is offered by the Micropelt technology. The recent development status of the Micropelt micro thermogenerators will be presented. The Micropelt platform technology now allows devices with up to ~8000 p-n-couples per cm
²
. Open circuit voltages achieved so far were about 2.3 V at 10 K temperature difference. Maximum power output was measured to be 2.8 mW. Thus they are suited as power supplies for harvesting energy in stand alone sensor systems for wireless data transmission. An evaluation setup to perform first level tests for the efficiency of harvesting waste energy using the microstructured thermogenerators will be presented.