Floating-disk parylene micro check valve

A novel micro check valve which has nearly ideal fluidic shunting behaviors is presented. Featuring a parylene-based floating disk, this surface-micromachined check valve ultimately realizes both zero forward cracking pressure and zero reverse leakage in fluidic operations. Two different floating disk designs have been implemented to demonstrate functionality of the microvalve. Experimental data of underwater testing successfully show that in-channel floating-disk valves in both designs have great fluidic performance close to an ideal check valve, except the additional fluidic resistance in the order of 10
¹³
N-s/m
⁵
based on dimensions of the fabricated devices. Their pressure loading limit have been confirmed to be higher than 300 kPa without water leakage. This type of micro check valve is believed to have great use of flow control in integrated microfluidics and lab-on-a-chip applications.