Silicon-based ultrasonic Lamb-wave multisensors

Initial experimental, analytical, and numerical evaluations are described of a microsensor that uses ultrasonic Lamb wave propagating in a thin plate supported by a silicon die. Because it is sensitive to many measurands, the device could operate as a microphone, biosensor, chemical vapor or gas detector, scale, pressure sensor, densitometer, radiometer, or thermometer. Lamb waves offer unique means for obtaining selective response, and permit sensitive operation in the low MHz frequency range in vacuum, in a gas, or while immersed in a liquid.<
>