Inversion-layer capacitance and mobility of very thin gate-Oxide MOSFET's

Inversion-layer capacitance has been experimentally characterized and identified to be the main cause of the second-order thickness-dependence of MOSFET characteristics. Field-dependent channel mobilities of both electrons and holes were independent of gate-oxide thicknesses from 50 to 450 Å, e.g., there is no evidence of the alleged mobility degradation in very thin gate-oxide MOSFET's. Subthreshold slope, insignificantly affected by the inversion-layer capacitance, follows the simple theory down to ∼ 35 Å of oxide thickness. The empirical equations for inversion-layer Capacitance and mobilities versus electric field are proposed.