Control of porosity and composition in large-area YBCO films to achieve micrometer thickness and high J/sub c/ on sapphire substrates

Relatively thick YBCO thin films (thickness d>0.5 /spl mu/m) ideal for fault current limiter as well as microwave applications have been successfully prepared by large-area pulsed laser deposition (PLD) on CeO/sub 2/-buffered sapphire substrates. The attainment of an unusually high film thickness (up to 2.0 /spl mu/m) without microcracking is attributed in part to the presence of pores correlated with yttrium-rich composition in the films. The effect of using YBCO targets with varied Y:Ba:Cu ratios on film porosity and surface morphology was investigated in detail. Using the optimum target composition, uniform critical current densities (J/sub c/) ranging from /spl sim/4.5 MA/cm/sup 2/ at d/spl sim/0.23 /spl mu/m to /spl sim/1.75 MA/cm/sup 2/ at d/spl sim/0.6 /spl mu/m have been achieved. Characterization of a film with d/spl sim/0.5 /spl mu/m showed low microwave surface resistance values [R/sub s/(77.3 K)/spl ap/2.09 m/spl Omega/ and R/sub s/(20 K)/spl ap/227 /spl mu//spl Omega/ at 22 GHz] comparable to the best YBCO films reported by other studies.