Non arcing electric contact device using the MEMS multi-electrodes

We proposed a new electric contact device that suppresses the arc phenomena. Electric contact functions are divided into energizing and switching. Switching contacts are the multi-electrodes and each electrode current is suppressed by series resistance. For realizing of the multi-contacting, cantilever beam array electrodes were formed on silicon substrate using micro electromechanical systems (MEMS) technology. Finite element method was used for optimizing structure. Reactive ion etching was used for making of cantilever. 0.97 A of contact current was broken by the Au plating electrodes.