Magnetics and microstructure of sputtered Ni/sub 80/Fe/sub 20//SiO/sub 2/ multilayer films

Multilayered Ni/sub 80/Fe/sub 20//SiO/sub 2/ films have been produced by sputter deposition. The effects of lamination on the bulk magnetic properties, microstructure, and high-frequency permeability of stacks with various Ni/sub 80/Fe/sub 20/ and SiO/sub 2/ thicknesses were investigated. In general, laminated films with a total magnetic thickness of 1.5 mu m had significantly lower H/sub c/ and extended frequency response, compared to unlaminated films of the same magnetic thickness. In addition, the impact of lamination on domain configuration of yoke-shaped structures was determined, and excellent agreement with micromagnetic theoretical prediction was obtained.<
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