# Journal of Microelectromechanical Systems

Includes the top 50 most frequently accessed documents for this publication according to the usage statistics for the month of

• ### Etch rates for micromachining processing-Part II

Publication Year: 2003, Page(s):761 - 778
Cited by:  Papers (455)  |  Patents (104)
| | PDF (1047 KB) | HTML

Samples of 53 materials that are used or potentially can be used or in the fabrication of microelectromechanical systems and integrated circuits were prepared: single-crystal silicon with two doping levels, polycrystalline silicon with two doping levels, polycrystalline germanium, polycrystalline SiGe, graphite, fused quartz, Pyrex 7740, nine other preparations of silicon dioxide, four preparation... View full abstract»

• ### What is the Young's Modulus of Silicon?

Publication Year: 2010, Page(s):229 - 238
Cited by:  Papers (643)  |  Patents (5)
| | PDF (577 KB) | HTML

The Young's modulus (E) of a material is a key parameter for mechanical engineering design. Silicon, the most common single material used in microelectromechanical systems (MEMS), is an anisotropic crystalline material whose material properties depend on orientation relative to the crystal lattice. This fact means that the correct value of E for analyzing two different designs in sil... View full abstract»

• ### A Review of On-Chip Micro Supercapacitors for Integrated Self-Powering Systems

Publication Year: 2017, Page(s):949 - 965
| | PDF (2200 KB) | HTML

Miniaturized self-powering systems that integrate both energy harvesters and energy storage units as the power sources are essential to realize maintenance-free wireless sensor networks, implantable medical devices, and active radio frequency identification systems. On-chip micro supercapacitors (MSCs) are promising candidates for energy storage in such systems by providing high power densities, f... View full abstract»

• ### Studies on surface wettability of poly(dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strength

Publication Year: 2005, Page(s):590 - 597
Cited by:  Papers (362)  |  Patents (15)
| | PDF (432 KB) | HTML

An issue in microfabrication of the fluidic channels in glass/poly (dimethyl siloxane) (PDMS) is the absence of a well-defined study of the bonding strength between the surfaces making up these channels. Although most of the research papers mention the use of oxygen plasma for developing chemical (siloxane) bonds between the participating surfaces, yet they only define a certain set of parameters,... View full abstract»

• ### Optical MEMS: From Micromirrors to Complex Systems

Publication Year: 2014, Page(s):517 - 538
Cited by:  Papers (34)
| | PDF (7448 KB) | HTML

Microelectromechanical system (MEMS) technology, and surface micromachining in particular, have led to the development of miniaturized optical devices with a substantial impact in a large number of application areas. The reason is the unique MEMS characteristics that are advantageous in fabrication, systems integration, and operation of micro-optical systems. The precision mechanics of MEMS, micro... View full abstract»

• ### Robust Method of Fabricating Epitaxially Encapsulated MEMS Devices with Large Gaps

Publication Year: 2017, Page(s):1235 - 1243
| | PDF (1942 KB) | HTML

This paper presents a novel wafer-level thin-film encapsulation process that allows both narrow and wide trenches, which are necessary for traditional structures such as combdrives. Fully functional devices with trench widths up to 50 μm are fabricated by employing a vapor phase XeF2 isotropic silicon etch to create large cavities and an epitaxial deposition seal to encapsulate t... View full abstract»

• ### Experimental Observation of Noise Reduction in Weakly Coupled Nonlinear MEMS Resonators

Publication Year: 2017, Page(s):1196 - 1203
| | PDF (3731 KB) | HTML

In this paper, we present the strongly nonlinear behavior of a 2-degree-of-freedom weakly coupled microelectromechanical systems (MEMS) resonator system in a mixed nonlinear regime, using a closed-loop phase feedback oscillator approach. Three out of four nonlinear bifurcation points within a strongly nonlinear coupled resonator system, with both electrical and mechanical nonlinearities, were reve... View full abstract»

• ### Review of MEMS Electromagnetic Vibration Energy Harvester

Publication Year: 2017, Page(s):1 - 16
Cited by:  Papers (6)
| | PDF (3535 KB) | HTML

This paper mainly introduces the research progress of MEMS electromagnetic vibration energy harvester, hoping to provide valuable guidance and reference for researchers in related fields. In this paper, recent studies are divided into three groups according to their objectives and approaches: reducing the resonant frequency of the harvester to collect low frequency vibration energy from the enviro... View full abstract»

• ### Etch rates for micromachining processing

Publication Year: 1996, Page(s):256 - 269
Cited by:  Papers (308)  |  Patents (257)
| | PDF (1532 KB)

The etch rates for 317 combinations of 16 materials (single-crystal silicon, doped, and undoped polysilicon, several types of silicon dioxide, stoichiometric and silicon-rich silicon nitride, aluminum, tungsten, titanium, Ti/W alloy, and two brands of positive photoresist) used in the fabrication of microelectromechanical systems and integrated circuits in 28 wet, plasma, and plasmaless-gas-phase ... View full abstract»

• ### Analysis and Elimination of the Capacitive Feedthrough Current on Electrostatically Actuated and Sensed Resonance-Based MEMS Sensors

Publication Year: 2017, Page(s):1272 - 1278
| | PDF (4101 KB) | HTML

This paper presents the investigation of two different capacitive feedthrough current elimination methods with an analysis of the effect of the capacitive feedthrough current on the resonance characteristics of electrostatically actuated and sensed resonant MEMS sensors. Electrostatically actuated and sensed resonators have various applications, such as accelerometers, gyroscopes, mass sensors, an... View full abstract»

• ### LC Passive Wireless Sensors Toward a Wireless Sensing Platform: Status, Prospects, and Challenges

Publication Year: 2016, Page(s):822 - 841
Cited by:  Papers (5)
| | PDF (4340 KB) | HTML

Inductor-capacitor (LC) passive wireless sensors use a transformer with loose coupling between an external readout coil and an inductor that receives power through this inductive coupling. Changes in the sensor are wirelessly and remotely detected by the readout coil, which makes them highly useful in applications that require the sensor to be powered remotely and to occupy a small volume, such as... View full abstract»

• ### Characterization of Nontoxic Liquid-Metal Alloy Galinstan for Applications in Microdevices

Publication Year: 2012, Page(s):443 - 450
Cited by:  Papers (155)
| | PDF (642 KB) | HTML

We have obtained interfacial properties of Galinstan, a nontoxic liquid-metal alloy, to help replace mercury in miniature devices. To prevent formation of an oxide skin that severely hinders the fluidic behavior of small Galinstan droplets and leads to inaccurate property data, we performed our experiments in a nitrogen-filled glove box. It was found that only if never exposed to oxygen levels abo... View full abstract»

• ### Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators

Publication Year: 2006, Page(s):1406 - 1418
Cited by:  Papers (298)  |  Patents (16)
| | PDF (2126 KB) | HTML

This paper reports theoretical analysis and experimental results on a new class of rectangular plate and ring-shaped contour-mode piezoelectric aluminum nitride radio-frequency microelectromechanical systems resonators that span a frequency range from 19 to 656 MHz showing high-quality factors in air (Qmax=4300 at 229.9 MHz), low motional resistance (ranging from 50 to 700 Omega), and c... View full abstract»

• ### A Passive Wireless Microelectromechanical Pressure Sensor for Harsh Environments

Publication Year: 2017, Page(s):1 - 13
| | PDF (2029 KB)

A microelectromechanical systems (MEMS) capacitive-type passive wireless pressure sensor designed to operate in harsh environments at temperatures up to 1000 °C is presented. The pressure sensor has a sapphire-based diaphragm and structural body, and a platinum-based capacitive element. The capacitive element is configured as a part of a slot patch antenna that is designed to operate in a f... View full abstract»

• ### MEMS Vacuum Pumps

Publication Year: 2017, Page(s):705 - 717
| | PDF (2557 KB) | HTML

This paper is the first comprehensive review on microelectromechanical systems (MEMS) vacuum pumps. Pumping of gases and generation of vacuum in micro-scaled devices are topics that have been quite rarely discussed in the literature. For years, attention was paid only to fluidic micropumps. In recent years, the situation has changed; these problems have become more and more important now. There is... View full abstract»

• ### Origami-Like 3-D Folded MEMS Approach for Miniature Inertial Measurement Unit

Publication Year: 2017, Page(s):1030 - 1039
| | PDF (4171 KB) | HTML

This paper presents a miniature 50 mm3 inertial measurement unit (IMU) implemented using a folded microelectromechanical systems (MEMS) process. The approach is based on wafer-level fabrication of high aspect-ratio single-axis sensors interconnected by flexible hinges and folded into a 3-D configuration, like a silicon Origami [1]. Two different materials for flexible hinges have been e... View full abstract»

• ### A Flexible Polymer Tactile Sensor: Fabrication and Modular Expandability for Large Area Deployment

Publication Year: 2006, Page(s):1681 - 1686
Cited by:  Papers (198)  |  Patents (6)
| | PDF (800 KB) | HTML

In this paper, we propose and demonstrate a modular expandable capacitive tactile sensor using polydimethylsiloxsane (PDMS) elastomer. A sensor module consists of 16times16 tactile cells with 1 mm spatial resolution, similar to that of human skin, and interconnection lines for expandability. The sensor has been fabricated by using five PDMS layers bonded together. In order to customize the sensiti... View full abstract»

• ### Creating, transporting, cutting, and merging liquid droplets by electrowetting-based actuation for digital microfluidic circuits

Publication Year: 2003, Page(s):70 - 80
Cited by:  Papers (800)  |  Patents (39)
| | PDF (1323 KB) | HTML

Reports the completion of four fundamental fluidic operations considered essential to build digital microfluidic circuits, which can be used for lab-on-a-chip or micro total analysis system (μTAS): 1) creating, 2) transporting, 3) cutting, and 4) merging liquid droplets, all by electrowetting, i.e., controlling the wetting property of the surface through electric potential. The surface used in ... View full abstract»

• ### Single Chip Gas Sensor Array for Air Quality Monitoring

Publication Year: 2017, Page(s):433 - 439
| | PDF (2324 KB) | HTML

This paper describes the fabrication of a four element gas sensor array for monitoring air pollutants, namely CO, CO2, NO2, and SO2. The four micro-heaters share a single suspended SiO2 diaphragm, utilizing thermal proximity to achieve low power consumption (~10 mW for 300 °C). Plasma enhanced chemical vapour deposition SiO2 diaphragm i... View full abstract»

• ### Gallium Nitride as an Electromechanical Material

Publication Year: 2014, Page(s):1252 - 1271
Cited by:  Papers (36)
| | PDF (5179 KB) | HTML

Gallium nitride (GaN) is a wide bandgap semiconductor material and is the most popular material after silicon in the semiconductor industry. The prime movers behind this trend are LEDs, microwave, and more recently, power electronics. New areas of research also include spintronics and nanoribbon transistors, which leverage some of the unique properties of GaN. GaN has electron mobility comparable ... View full abstract»

• ### Design, Fabrication, and Characterization of Scandium Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducers

Publication Year: 2017, Page(s):1132 - 1139
Cited by:  Papers (2)
| | PDF (2187 KB) | HTML

This paper presents the design, fabrication, and characterization of piezoelectric micromachined ultrasound transducers (PMUTs) based on scandium aluminum nitride (ScxAl1-xN) thin films (x = 15%). ScAlN thin film was prepared with a dual magnetron system and patterned by a reactive ion etching system utilizing chlorine-based chemistry with an etching rate of 160 nm/min. The f... View full abstract»

• ### Lithium Niobate MEMS Chirp Compressors for Near Zero Power Wake-Up Radios

Publication Year: 2017, Page(s):1204 - 1215
| | PDF (2686 KB) | HTML

This paper presents the first demonstration of chirp compressors based on laterally vibrating modes in suspended lithium niobate thin films. Both shear-horizontal and length-extensional modes have been explored and demonstrated with the electromechanical coupling coefficients of 30% and 39%, respectively, in a double-dispersive delay line structure. The high electromechanical coupling, along with ... View full abstract»

• ### The Piezoresistive Effect of SiC for MEMS Sensors at High Temperatures: A Review

Publication Year: 2015, Page(s):1663 - 1677
Cited by:  Papers (34)
| | PDF (2987 KB) | HTML

Silicon carbide (SiC) is one of the most promising materials for applications in harsh environments thanks to its excellent electrical, mechanical, and chemical properties. The piezoresistive effect of SiC has recently attracted a great deal of interest for sensing devices in hostile conditions. This paper reviews the piezoresistive effect of SiC for mechanical sensors used at elevated temperature... View full abstract»

• ### Ultra-Low Resonant Piezoelectric MEMS Energy Harvester With High Power Density

Publication Year: 2017, Page(s):1226 - 1234
| | PDF (2522 KB) |  Media

We demonstrate a microscale vibration energy harvester exhibiting an ultra-low resonance frequency and high power density. A spiral shaped microelectromechanical system (MEMS) energy harvester was designed to harvest ambient vibrations at a low frequency (<;200 Hz) and acceleration (<;0.25 g). High quality Pb(Zr0.48Ti0.52)O3 (PZT) film with 1.8 μm-thic... View full abstract»

• ### Parametric Noise Reduction in a High-Order Nonlinear MEMS Resonator Utilizing Its Bifurcation Points

Publication Year: 2017, Page(s):1189 - 1195
| | PDF (2053 KB) | HTML

An electrostatically actuated non-linear microelectromechanical systems (MEMS) resonator can describe double hysteresis behavior in the measured frequency response due to the interplay between electrical and mechanical non-linearities in the system. This paper provides the first experimental mapping of the stable and unstable branches of the frequency response of a MEMS resonator describing a doub... View full abstract»

• ### Improved Dynamic Range of Microwave Power Sensor by MEMS Cantilever Beam

Publication Year: 2017, Page(s):1183 - 1185
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This letter reports a microwave power sensor with improved dynamic range based on MEMS cantilever beam. The proposed power sensor is manufactured using GaAs microwave monolithic integrated circuit (MMIC) technology. In this design, a cantilever by-pass coupling structure is adopted for high power detection, while the terminating thermoelectric sensor is utilized for low power detection. The novelt... View full abstract»

• ### MEMS Gyroscopes Based on Piezoresistive NEMS Detection of Drive and Sense Motion

Publication Year: 2017, Page(s):1389 - 1399
| | PDF (2237 KB) | HTML

This paper presents yaw and pitch microelectromechanical system gyroscopes embedding four active nanoelectromechanical (NEMS) piezoresistive gauges each, two of which are used for differential sensing of the Coriolis motion, and two of which are innovatively used to sense the drive motion and thus to close the drive oscillation loop. After presenting the devices design, this paper discusses the ad... View full abstract»

• ### A Review on Development and Optimization of Microheaters for High-Temperature In Situ Studies

Publication Year: 2017, Page(s):1165 - 1182
| | PDF (3578 KB) | HTML

Microelectromechanical systems (MEMS)-based sample carriers became a breakthrough for in situ inspection techniques, especially in transmission electron microscopy where the sample carrier functions as a microsized laboratory and enables dynamic studies on samples, such as nanoparticles, nanowires, lamellas, and 2-D materials. Microheaters allow for in situ manipulation of samples by applying heat... View full abstract»

• ### Micropatterning of Liquid Metal by Dewetting

Publication Year: 2017, Page(s):1244 - 1247
| | PDF (1096 KB) | HTML

Although gallium-based liquid metals are attracting growing interest thanks to its potential applications in deformable, flexible electronic devices, challenges in fabrication associated with the high surface tension and oxide skin remain to be overcome. We report a novel fabrication technique for liquid metal circuits using dewetting. An excessively thin liquid film spontaneously shrinks on a sub... View full abstract»

• ### Piezoelectric Membrane Actuators for Micropump Applications Using PVDF-TrFE

Publication Year: 2017, Page(s):1 - 9
| | PDF (4419 KB)

This paper presents the design, fabrication, and performance evaluation of a biocompatible piezoelectric membrane actuator (PMA) using polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE). Electrode structure optimization was verified by a finite element method simulation software. Fabrication was done utilizing only standard microfabrication techniques. 1-μm-thick membrane and 1.5-μ... View full abstract»

• ### On-Chip Positionable Waveguides for Submicrometric Photonic Alignment

Publication Year: 2017, Page(s):1259 - 1271
| | PDF (3720 KB) | HTML Media

In this paper, we present positionable photonic waveguide arrays that are developed for optical chip-to-chip alignment. Partly suspended photonic structures, based on the Si3N4/SiO2 material platform, are equipped with thermal actuators enabling the free end of the structures to be positioned with submicrometer accuracy. A finite-element model is developed to provi... View full abstract»

• ### CMOS-MEMS Micro-Mirror Arrays by Post-Processing ASMC 0.35- $mu text{m}$ CMOS Chips

Publication Year: 2017, Page(s):1435 - 1441
| | PDF (4620 KB) | HTML

An electrostatic bi-stable 4 × 4 micro-mirror array is implemented by using the standard Advanced Semiconductor Manufacturing Corporation 0.35-μm 2-Poly-3-Metal fabless complementary metal-oxide-semiconductor microelectromechanical systems (CMOS-MEMS) process. Mechanical structures, including mirrors (18 μm×18 μm in area each), electrostatic actuation mechanisms,... View full abstract»

• ### Monolithic FFF-Printed, Biocompatible, Biodegradable, Dielectric-Conductive Microsystems

Publication Year: 2017, Page(s):1356 - 1370
| | PDF (5648 KB) | HTML

We report additively manufactured biodegradable microsystems composed of dielectric and electrically conductive layers. The devices were made via fused filament fabrication (FFF), which is arguably the simplest and cheapest commercial 3-D printing technology, done with the most inexpensive printing hardware. The base constitutive material is polylactic acid (PLA)-a biodegradable polymer made of co... View full abstract»

• ### Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer

Publication Year: 2000, Page(s):76 - 81
Cited by:  Papers (646)  |  Patents (141)
| | PDF (576 KB)

This paper describes a fabrication technique for building three-dimensional (3-D) micro-channels in polydimethylsiloxane (PDMS) elastomer. The process allows for the stacking of many thin (less than 100-/spl mu/m thick) patterned PDMS layers to realize complex 3-D channel paths. The master for each layer is formed on a silicon wafer using an epoxy-based photoresist (SU 8). PDMS is cast against the... View full abstract»

• ### A Piezoelectric Twisting Beam Actuator

Publication Year: 2017, Page(s):1279 - 1286
Cited by:  Papers (1)
| | PDF (2166 KB) | HTML

We present a novel piezoelectric bulk-unimorph beam actuator that can be directly driven in twisting. The bulk-unimorph beam is driven by interdigitated electrodes (IDEs), deposited over its top and bottom surfaces. These IDEs are oriented at 45° relative to the beam axis, and they are used for both poling and actuation. When subjected to a driving voltage, the IDEs induce both axial and sh... View full abstract»

• ### Miniaturized Diaphragm Vacuum Pump by Multi-Material Additive Manufacturing

Publication Year: 2017, Page(s):1316 - 1326
| | PDF (3013 KB) | HTML

This paper reports the first demonstration of a multi-material, fully additively manufactured, miniature diaphragm pump for creation and maintenance of low vacuum from atmospheric conditions. Using polyjet 3-D printing technology with 42 μm XY pixelation and 16 μm or 25 μm tall voxels, a single-stage vacuum pump design with active valves that has a total pumping volume of 1 cm... View full abstract»

• ### A curved-beam bistable mechanism

Publication Year: 2004, Page(s):137 - 146
Cited by:  Papers (189)  |  Patents (52)
| | PDF (368 KB) | HTML

This paper presents a monolithic mechanically-bistable mechanism that does not rely on residual stress for its bistability. The typical implementation of this mechanism is two curved centrally-clamped parallel beams, hereafter referred to as "double curved beams". Modal analysis and finite element analysis (FEA) simulation of the curved beam are used to predict, explain, and design its bistable be... View full abstract»

• ### Thermomechanically Tunable Infrared Metamaterials Using Asymmetric Split-Ring Resonators

Publication Year: 2017, Page(s):1186 - 1188
| | PDF (512 KB) | HTML

We demonstrate a nanoelectromechanical systems-based tunable infrared metamaterial formed with an array of Au/Si bilayer split-ring resonators having two asymmetric arms. The wider arm of the resonator is anchored on the substrate, while the thinner one is free to bend in vertical direction by varying temperature. The bending of the thin arm changes the air gap between the two arms, and thus modul... View full abstract»

• ### Scaling and Performance Analysis of MEMS Piezoelectric Energy Harvesters

Publication Year: 2017, Page(s):679 - 690
| | PDF (4292 KB) | HTML

Vibrational energy harvesters have been phenomenally adopted to absorb energy from mechanical vibrations and convert them into electrical energy. Power developed by such harvesters depends significantly on material properties and harvester geometry. Moreover, the power generated by micro-scale harvesters scales down rapidly. Hence, it is important to find scaling rules that ensure maximum power ge... View full abstract»

• ### Low-Pressure Wafer-Level-Packaged Capacitive Accelerometers With High Dynamic Range and Wide Bandwidth Using Nano-Gap Sloped Electrode Design

Publication Year: 2017, Page(s):1335 - 1344
| | PDF (3963 KB) | HTML

This paper reports on the design, fabrication, and characterization of wafer-level-packaged wide-bandwidth capacitive accelerometers with high aspect-ratio nanometer scale gaps utilizing sloped electrode configuration. Narrow gaps defined by the thickness of a sacrificial layer provide an increased electromechanical coupling that enables designing sensors with high operational bandwidth (~15 kHz),... View full abstract»

• ### Capacitive-Piezoelectric Transducers for High- $Q$ Micromechanical AlN Resonators

Publication Year: 2015, Page(s):458 - 473
Cited by:  Papers (11)
| | PDF (3600 KB) | HTML

A capacitive-piezoelectric (also known as, capacitive-piezo) transducer that combines the strengths of capacitive and piezoelectric mechanisms to achieve a combination of electromechanical coupling and Q higher than otherwise attainable by either mechanism separately, has allowed demonstration of a 1.2-GHz contour-mode aluminum nitride (AlN) ring resonator with Q > 3000 on par with the highest ... View full abstract»

• ### Engineering the Structural Nonlinearity Using Multimodal-Shaped Springs in MEMS

Publication Year: 2017, Page(s):1 - 7
| | PDF (1997 KB)

The purpose of this paper is to introduce a novel technique to engineer in a precise way the structural nonlinearity in MEMS springs. To perform the adjustment of structural nonlinearity, the idea of using a sine-shaped beam following the combination of the natural bending modes of a straight one is explored to create a multimodal-shaped spring. The basic analytical model of multimodal beam bendin... View full abstract»

• ### RF MEMS Inductors and Their Applications—A Review

Publication Year: 2017, Page(s):17 - 44
Cited by:  Papers (1)
| | PDF (5203 KB) | HTML

Inductors are primary elements in many radio frequency circuitries and devices. This review gives a comprehensive survey on the developments and performances of fixed and variable RF MEMS inductors. MEMS inductors are the core of this review due to their high-yield performances and the wide choices of possible tuning techniques. First, the factors that constrain high-performance micro coils and th... View full abstract»

• ### Fabrication of Novel MEMS Microgrippers by Deep Reactive Ion Etching With Metal Hard Mask

Publication Year: 2017, Page(s):926 - 934
| | PDF (5912 KB) | HTML

The fabrication of a novel class of microgrippers is demonstrated by means of bulk microelectromechanical systems (MEMS) technology using silicon on insulator wafer substrates and deep reactive ion etching. Hard masking is implemented to maximize the selectivity of the bulk etching using sputtered aluminum and aluminum-titanium thin films. The microroughness problem related to the use of metal mas... View full abstract»

• ### Stress Effects and Compensation of Bias Drift in a MEMS Vibratory-Rate Gyroscope

Publication Year: 2017, Page(s):569 - 579
Cited by:  Papers (1)
| | PDF (3428 KB) | HTML

Long-term gyroscope drift can be effectively removed by employing simultaneous on-chip stress and temperature compensation. Stress effects are significant and their inclusion augments the commonly applied temperature compensation. A silicon-on-insulator matched-mode z-axis vibratory-rate gyroscope, as a prototype testbed to study these effects, includes released silicon resistors connected in a Wh... View full abstract»

• ### Freestanding Micro-Supercapacitor With Interdigital Electrodes for Low-Power Electronic Systems

Publication Year: 2017, Page(s):1055 - 1062
| | PDF (2223 KB) | HTML

With the rapid development of miniaturized multi-functional systems, micro-energy-storage devices have drawn increasing attention due to the importance of power supply. In this paper, a novel fabrication for freestanding solidstate micro-supercapacitors (MSCs) has been proposed and developed by combining electrolyte transferring with laser patterning process. Typical freestanding MSC is composed o... View full abstract»

• ### MEMS for Nanopositioning: Design and Applications

Publication Year: 2017, Page(s):469 - 500
| | PDF (14245 KB) | HTML

Nanopositioners are high-precision mechatronic devices that are capable of generating mechanical motion with nanometer or sub-nanometer resolution. With this motion typically being available over mechanical bandwidths of several kilohertz or greater, nanopositioners have become important tools for many areas of nanotechnology. A major development in nanopositioning has been the use of microelectro... View full abstract»

• ### Normal and Shear Force Measurement Using a Flexible Polymer Tactile Sensor With Embedded Multiple Capacitors

Publication Year: 2008, Page(s):934 - 942
Cited by:  Papers (123)  |  Patents (4)
| | PDF (1648 KB) | HTML

In this paper, we report a new flexible capacitive tactile sensor array with the capability of measuring both normal and shear force distribution using polydimethylsiloxane (PDMS) as a base material. A tactile cell consists of two thick PDMS layers with embedded electrodes, an air gap, and a pillar structure. The pillar structure is formed at the center of each tactile cell between the air gap und... View full abstract»

• ### A Wireless Passive Pressure and Temperature Sensor via a Dual LC Resonant Circuit in Harsh Environments

Publication Year: 2017, Page(s):351 - 356
Cited by:  Papers (2)
| | PDF (6017 KB) | HTML

This paper presents a passive wireless sensor for simultaneously and remotely measuring pressure and temperature under harsh environments. The sensor consists of a dual LC (inductor and capacitor) resonant circuit, one without a cavity and the other with a cavity capacitor for temperature and pressure sensing, respectively. The low-temperature co-fired ceramic technology is used to fabricate the s... View full abstract»

• ### Thermoresistive Effect for Advanced Thermal Sensors: Fundamentals, Design Considerations, and Applications

Publication Year: 2017, Page(s):966 - 986
| | PDF (4253 KB) | HTML

Microelectromechanical systems sensors have been intensively developed utilizing various physical concepts, such as piezoresistive, piezoelectric, and thermoresistive effects. Among these sensing concepts, the thermoresistive effect is of interest for a wide range of thermal sensors and devices, thanks to its simplicity in implementation and high sensitivity. The effect of temperature on the elect... View full abstract»

## Aims & Scope

The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.

Full Aims & Scope

## Meet Our Editors

Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems