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Journal of Microelectromechanical Systems

Issue 3 • Sep 1993

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Displaying Results 1 - 4 of 4
  • Piezoelectric microphone with on-chip CMOS circuits

    Publication Year: 1993, Page(s):111 - 120
    Cited by:  Papers (67)  |  Patents (10)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (956 KB)

    An IC-processed piezoelectric microphone with on-chip, large-scale integrated (LSI) CMOS circuits has been designed, fabricated, and tested in a joint, interactive process between a commercial CMOS foundry and a university micromachining facility. The 2500×2500×3.5 μm 3 microphone has a piezoelectric ZnO layer on a supporting low-pressure chemical-vapor-deposited (LPCVD),... View full abstract»

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  • Controlled stepwise motion in polysilicon microstructures

    Publication Year: 1993, Page(s):106 - 110
    Cited by:  Papers (89)  |  Patents (33)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (376 KB)

    This paper presents a polysilicon slider and a rotor capable of stepwise motion. These devices were fabricated on a silicon wafer with surface micromachine technology. The proportional relation between the velocity of motion and the frequency of the applied pulse was experimentally confirmed. The peak value of the applied pulse determines the step length. The step values observed were in the range... View full abstract»

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  • Fabrication of distributed electrostatic micro actuator (DEMA)

    Publication Year: 1993, Page(s):121 - 127
    Cited by:  Papers (26)  |  Patents (51)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (672 KB)

    A distributed electrostatic micro actuator (DEMA) has been proposed. The actuator has many small driving units which consist of two wave-like insulated electrodes. Both ends of insulated electrodes are connected to each other, and the driving unit has narrow gap for deformation caused by electrostatic forces. The driving units have large area of electrodes and are distributed in series and in para... View full abstract»

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  • Theoretical modeling of microfabricated beams with elastically restrained supports

    Publication Year: 1993, Page(s):128 - 137
    Cited by:  Papers (22)  |  Patents (1)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (648 KB)

    A mathematical model is developed to analyze the mechanical behavior of step-up supports which typically result from surface micromachining. This model accounts for the finite stiffness of the step-up support, which is more accurately represented by an elastically restrained boundary condition rather than a fixed or built-in boundary condition. Based on the model developed, the deflection of canti... View full abstract»

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Aims & Scope

The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.

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Meet Our Editors

Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems