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Journal of Microelectromechanical Systems

Issue 1 • Mar 1993

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Displaying Results 1 - 6 of 6
  • Mechanical stability and adhesion of microstructures under capillary forces. II. Experiments

    Publication Year: 1993, Page(s):44 - 55
    Cited by:  Papers (180)  |  Patents (23)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (1144 KB)

    For pt.I see ibid., vol.2, p. 33 (1993). Strong capillary forces are developed in the fabrication process of surface micromachined structures during the wet etch of sacrificial layers. The magnitude of these forces is in some cases sufficient to deform and pin these structures to the substrate resulting in device failure. The deflection, mechanical stability, and adhesion of thin micromechanical s... View full abstract»

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  • Mechanical stability and adhesion of microstructures under capillary forces. I. Basic theory

    Publication Year: 1993, Page(s):33 - 43
    Cited by:  Papers (280)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (768 KB)

    Strong capillary forces are developed in the fabrication process of surface micromachined structures during the wet etch of sacrificial layers. The magnitude of these forces is in some cases sufficient to deform and pin these structures to the substrate resulting in device failure. The deflection, mechanical stability, and adhesion of thin micromechanical structure under capillary forces are exami... View full abstract»

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  • E-beam-induced fabrication of microstructures

    Publication Year: 1993, Page(s):30 - 32
    Cited by:  Papers (3)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (332 KB)

    E-beam-induced deposition of tungsten, W, from a metal-organic gas has been used for the formation of microstructures of various geometries. Three examples have been selected for demonstration: line deposition, needle growth, and bridge formation. Important parameters of the W deposition process from W(CO)6 gas are given, among them minimum feature size, positional accuracy, and growth ... View full abstract»

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  • Permanent magnet micromotors on silicon substrates

    Publication Year: 1993, Page(s):23 - 29
    Cited by:  Papers (47)  |  Patents (7)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (1032 KB)

    Different types of sliding, rolling, or rotating micromotors with rare-earth-based permanent magnet rotors are presented. The magnets move synchronously with rotating or traveling magnetic fields generated by 25-μm-thick gold current lines on silicon substrates. The magnets are guided in channels or openings in the silicon itself or in additional glass layers. For magnets with a typical dimensi... View full abstract»

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  • A fully integrated surface micromachined magnetic microactuator with a multilevel meander magnetic core

    Publication Year: 1993, Page(s):15 - 22
    Cited by:  Papers (59)  |  Patents (7)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (1124 KB)

    A fully integrated magnetic microactuator using surface micromachining techniques is presented. To achieve this device, low-resistance meander conductors located in a single plane were interwoven with multilevel meander magnetic cores. This `wrapped' solenoid (with the core wrapped around the conductor) was fabricated in a fully integrated fashion. A magnetic microactuator was realized by incorpor... View full abstract»

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  • Infinitesimal machinery

    Publication Year: 1993, Page(s):4 - 14
    Cited by:  Papers (18)  |  Patents (4)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (1112 KB)

    The author discusses the sacrificial-layer method of making silicon micromotors, the use of electrostatic actuation, and the importance of friction and contact sticking in such devices. The persistent problem of finding meaningful applications for these tiny machines is discussed, touching a range of topics along the way. The future of computation using a register made of atoms, and quantum-mechan... View full abstract»

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Aims & Scope

The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.

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Meet Our Editors

Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems