Issue 7 • Date July 2011
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Displaying Results 1 - 25 of 27
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Editorial
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PDF (133 KB)
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Fabrication of two-point-supported annular microresonators with vertical transducer gaps
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PDF (193 KB)
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Influence of thickness on structural and optical properties of evaporated tin sulphide films
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PDF (326 KB)
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Optimisation and fabrication of low-stress, low-temperature silicon oxide cantilevers
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PDF (450 KB)
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Glass-based integrated capacitive sensors for detection of the neurotransmitter dopamine
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PDF (289 KB)
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Micromachined inertial measurement unit fabricated by a SOI process with selective roughening under structures
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PDF (703 KB)
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Effect of sol-gel composition ratio and laser power on phase transformation of crystalline titanium dioxide under CO2 laser annealing
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PDF (373 KB)
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Design and fabrication of coplanar waveguide probes for single-cell impedance measurement using radio frequency
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PDF (641 KB)
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Low cross-axis sensitivity micro-gravity microelectromechanical system sandwich capacitance accelerometer
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PDF (538 KB)
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Z-axis differential silicon-on-insulator resonant accelerometer with high sensitivity
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PDF (372 KB)
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Design and fabrication of long-focal-length microlens arrays for Shack-Hartmann wavefront sensors
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PDF (522 KB)
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Thermal switch design by using complementary metal??oxide semiconductor MEMS fabrication process
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PDF (367 KB)
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Characterisation of a suspended nanowire channel thin-film transistor with sub-100 nm air gap
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PDF (329 KB)
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Optimal materials and process conditions of functional layers for piezoelectric MEMS process at high temperature
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PDF (632 KB)
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