Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Issue 5 • Date Sep 2011
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Displaying Results 1 - 25 of 29
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Hydrogen effects in hydrofluorocarbon plasma etching of silicon nitride: Beam study with CF+,
CF 2+CHF 2+
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PDF (294 KB)
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Kelvin probe force microscopy-based characterization techniques applied for electrostatic MEMS/NEMS devices and bare dielectric films to investigate the dielectric and substrate charging phenomena
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PDF (5016 KB)
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Photovoltaic characteristics of a-Si/β-FeSi
2 /c-Si double heterojunction fabricated by magnetron sputtering |
PDF (292 KB)
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Imaging and phase identification of Cu
2 ZnSnS4 thin films using confocal Raman spectroscopy |
PDF (2607 KB)
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Effects of temperature and near-substrate plasma density on the structural and electrical properties of dc sputtered germanium thin films
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PDF (1179 KB)
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Inductively coupled plasma etching of graded-refractive-index layers of TiO
2 and SiO2 using an ITO hard mask |
PDF (3326 KB)
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Formation of tetragonal or monoclinic ZrO
2 coatings by oxygen plasma treatment of Zr74.7 Cu19.7 Nb5.6 glassy thin films |
PDF (1424 KB)
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Mechanisms for sealing of porous low-k SiOCH by combined He and NH
3 plasma treatment |
PDF (2645 KB)
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Modeling of implantation and mixing damage during etching of SiO
2 over Si in fluorocarbon plasmas |
PDF (6158 KB)
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Size control of nanopores formed on SiO
2 glass by swift-heavy-ion irradiation and its application to highly sensitive biomolecular detection |
PDF (1000 KB)
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Effect of substrate temperature on the properties of transparent conductive ZnO:Al thin films prepared by RF sputtering
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PDF (284 KB)
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Dependence of film texture on substrate and growth conditions for CdTe films deposited by close-spaced sublimation
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PDF (1814 KB)
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Silicon nanoparticle synthesis by short-period thermal anneals at atmospheric pressure in argon
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PDF (1818 KB)
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Impact of parasitic reactions on wafer-scale uniformity in water-based and ozone-based atomic layer deposition
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PDF (1122 KB)
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Polymer wires with quantum dots grown by molecular layer deposition of three source molecules for sensitized photovoltaics
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PDF (1333 KB)
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Growth temperature control of the epitaxy, magnetism, and transport in SrTiO
3 (001)/La0.5 Sr0.5 CoO3 thin films |
PDF (3423 KB)
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Vibrational spectroscopy of low-k/ultra-low-k dielectric materials on patterned wafers
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PDF (941 KB)
Aims & Scope
The Journal of Vacuum Science and Technology A is devoted to reports of original research, review articles, and Critical Review articles.
Meet Our Editors
Editor
G. Lucovsky
North Carolina State University
