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Browse Journals & Magazines > Journal of Vacuum Science & Te ... Volume 29 Issue 2

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Issue 2 • Date Mar 2011

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Title History

Status and potential of atmospheric plasma processing of materials

Physical vapor deposition and patterning of calcium fluoride films

High-corrosion-resistant Al₂O₃ passivation-film formation by selective oxidation on austenitic stainless steel containing Al

MIAMI: Microscope and ion accelerator for materials investigations

Spectroscopic ellipsometry and x-ray photoelectron spectroscopy of La₂O₃ thin films deposited by reactive magnetron sputtering

Experimental evaluation of an adaptive Joule–Thomson cooling system including silicon-microfabricated heat exchanger and microvalve components

Formation of Pd nanocrystals in titanium-oxide film by rapid thermal annealing of reactively cosputtered TiPdO films

Surface activated bonding of copper through silicon vias and gold stud bumps at room temperature

Confirmation of sample quality: X-ray and ultraviolet photoelectron spectroscopies of uranium dioxide

High rate deep Si etching for through-silicon via applications

Highly textured growth of AlN films on sapphire by magnetron sputtering for high temperature surface acoustic wave applications

Surface melting and recrystallization of a self-assembled octanethiol monolayer on Au(111)

Plasma-enhanced chemical vapor deposition synthesis of silica-silicone nanolaminates using a single precursor

Microstructure and residual stress of magnetron sputtered nanocrystalline palladium and palladium gold films on polymer substrates

Deposition of ultrathin AlN films for high frequency electroacoustic devices

Ripple formation on atomically flat cleaved Si surface with roughness of 0.038 nm rms by low-energy Ar¹⁺ ion bombardment

Atomic layer deposition of Ru from CpRu(CO)₂Et using O₂ gas and O₂ plasma

Polymer molded templates for nanostructured amorphous silicon photovoltaics

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