Dept. of Mech. Sci. & Eng., Univ. of Illinois at Urbana-Champaign, Urbana, IL, USA
(3)
Dept. of Biomed. Eng., Univ. of Southern California, Los Angeles, CA, USA
(1)
Dept. of Electr. & Comput. Eng., Wayne State Univ., Detroit, MI, USA
(1)
Sandia Nat. Labs., Albuquerque, NM, USA
(1)
Dept. of Phys., North Carolina State Univ., Raleigh, NC, USA
(1)
Lehigh Univ., Bethlehem, PA, USA
(1)
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
(1)
Dept. of Mech. Eng., Columbia Univ., New York, NY, USA
(1)
New Ind. Creation Hatchery Center, Tohoku Univ., Sendai, Japan
(1)
Key Lab. of MEMS of Minist. of Educ., Southeast Univ., Nanjing, China
(1)
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
(1)
E.L. Ginzton Lab., Stanford Univ., Stanford, CA, USA
(1)
Dept. of Eng. Sci., Uppsala Univ., Uppsala, Sweden
(1)
Dept. of Microsyst. Eng. (IMTEK), Univ. of Freiburg, Freiburg, Germany
(1)
Dept. of Bio & Brain Eng., Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea
(1)
Dept. of Mech. Eng., Virginia Commonwealth Univ., Richmond, VA, USA
(1)
Dept. of Syst. & Naval Mechatron. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
(1)
Microsaic Syst. Ltd., Guildford, UK
(1)
State Key Lab. of Transducer Technol. & Sci. & Technol. on Microsyst. Lab., Chinese Acad. of Sci., Shanghai, China
(1)
Inst. of Electr. Eng. Fundamentals, Wroclaw Univ. of Technol. (WUT), Wroclaw, Poland
(1)
Arbeitsgebiet Mikrostrukturtechnik, Tech. Univ. Dortmund, Dortmund, Germany
(1)
WiOptix Inc., Gainesville, FL, USA
(1)
Sci. & Technol. on Microsyst. Lab., Chinese Acad. of Sci., Shanghai, China
(1)
Div. of Mech. Eng., Ajou Univ., Suwon, South Korea
(1)
Adv. Imaging Technol. Group, Massachusetts Inst. of Technol. Lincoln Lab., Lexington, MA, USA
(1)
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