Dept. of Electr. & Comput. Eng., Texas Tech Univ., Lubbock, TX, USA
(2)
Microsyst. Technol. Labs., Massachusetts Inst. of Technol., Cambridge, MA, USA
(2)
Micromachined Products Div., Analog Devices, Inc., Cambridge, MA, USA
(2)
Dept. of Mech. Eng. & Mater. Sci., Rice Univ., Houston, TX, USA
(1)
Dept. of Electr. & Comput. Eng., Duke Univ., Durham, NC, USA
(1)
Stanford Univ., Stanford, CA, USA
(1)
Inst. of Microelectron., Peking Univ., Beijing, China
(1)
Mech. & Aerosp. Eng. Dept., Univ. of California, Los Angeles, CA, USA
(1)
Dept. of Electr. Eng. & Comput. Sci., Massachusetts Inst. of Technol., Cambridge, MA, USA
(1)
Dept. of Electr. Eng. & Comput. Sci., Univ. of California, Irvine, CA, USA
(1)
Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA
(1)
Dept. of Electr. & Comput. Eng., Univ. of British Columbia, Vancouver, BC, Canada
(1)
Dept. of Electr. & Syst. Eng., Univ. of Pennsylvania, Philadelphia, PA, USA
(1)
Mech. Eng. Dept., Univ. of Washington, Seattle, WA, USA
(1)
IBM Res., Zurich, Switzerland
(1)
Dept. of Appl. Sci., Univ. of California, Davis, CA, USA
(1)
Dept. of Electr. & Comput. Eng., Univ. of West Florida, Pensacola, FL, USA
(1)
Dept. of Electron., Carleton Univ., Ottawa, ON, Canada
(1)
Dept. of Microsyst. Eng. (IMTEK), Univ. of Freiburg, Freiburg, Germany
(1)
Dept. of Syst. Design Eng., Univ. of Waterloo, Waterloo, ON, Canada
(1)
Dept. of Mech. & Ind. Eng., Ryerson Univ., Toronto, ON, Canada
(1)
Opt. Nanostruct. Lab., Columbia Univ., New York, NY, USA
(1)
Lab. of Robot. Syst., Swiss Fed. Inst. of Technol. Lausanne, Lausanne, Switzerland
(1)
Dept. of Mech. Eng., Binghamton Univ.-State Univ. of New York, Binghamton, NY, USA
(1)
Dept. of Civil & Environ. Eng., Nat. Univ. of Kaohsiung, Kaohsiung, Taiwan
(1)
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