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Browse Journals & Magazines > Journal of Vacuum Science & Te ... Volume 28 Issue 3

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Issue 3 • Date May 2010

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Title History

Initial growth stage evaluation of high quality ZnSe films deposited on glass substrate

Highly piezoelectric AlN thin films grown on amorphous, insulating substrates

Residual stress stability in fiber textured stoichiometric AlN film grown using rf magnetron sputtering

Angular distribution of atoms emitted from a SrZrO₃ target by laser ablation under different laser fluences and oxygen pressures

Enhanced retained dose uniformity in NiTi spinal correction rod treated by three-dimensional mesh-assisted nitrogen plasma immersion ion implantation

Real-time spectroellipsometric characterization of nucleation, islanding, and coalescence behavior of boron films grown by soft x-ray excited chemical vapor deposition

Electrostatic quadrupole plasma mass spectrometer measurements during thin film depositions using simultaneous matrix assisted pulsed laser evaporation and magnetron sputtering

Highly conductive indium zinc oxide prepared by reactive magnetron cosputtering technique using indium and zinc metallic targets

TiCN coatings deposited by large area filtered arc deposition technique

ZnO nanocrystals on SiO₂/Si surfaces thermally cleaned in ultrahigh vacuum and characterized using spectroscopic photoemission and low energy electron microscopy

Leak rate of water into vacuum through microtubes

Comparative study between erbium and erbium oxide-doped diamondlike carbon films deposited by pulsed laser deposition technique

Effect of fluorine flow and deposition temperature on physical characteristics and stability of fluorine-doped siloxane-based low-dielectric-constant material

Fabrication of freestanding LiNbO₃ thin films via He implantation and femtosecond laser ablation

Modeling for calculation of vanadium oxide film composition in reactive-sputtering process

High resolution Raman imaging of single wall carbon nanotubes using electrochemically etched gold tips and a radially polarized annular beam

Atmospheric oxygen plasma activation of silicon (100) surfaces

Bent belt-beam gauge: Extending low-pressure measurement limits in a hot-cathode ionization vacuum gauge by combining multiple methods

Spectroellipsometric investigation of optical, morphological, and structural properties of reactively sputtered polycrystalline AlN films

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