By Topic

IBM Journal of Research and Development

Issue 6 • Date Nov. 1973

Filter Results

Displaying Results 1 - 13 of 13
  • Design and Operation of ETA, an Automated Ellipsometer

    Publication Year: 1973, Page(s):472 - 489
    Cited by:  Patents (10)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (950 KB)

    The design and operational features are described for a computer-assisted ellipsometer (called ETA for Ellipsometric Thickness Analyzer), developed to provide reliable, real-time measurement of field-effect transistor gate insulator thickness in a manufacturing environment. ETA illuminates the sample with light of fixed polarization and uses a rotating analyzer to measure the polarization of the r... View full abstract»

    Full text access may be available. Click article title to sign in or learn about subscription options.
  • Rapid, Precise, Computer-controlled Measurement of X-Y Coordinates

    Publication Year: 1973, Page(s):490 - 499
    Cited by:  Patents (3)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (593 KB)

    An experimental x-y measurement system is described that was designed for the high-speed, high-precision measurements required in integrated circuit manufacturing and for optical measurement applications in which a sufficiently large data base is required for statistical process analysis. The technology for this experimental system differs considerably from that of conventional optical measuring s... View full abstract»

    Full text access may be available. Click article title to sign in or learn about subscription options.
  • Interactive Use of a Time-shared Process Control Computer in Electrophotographic Sensitometry

    Publication Year: 1973, Page(s):500 - 508
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (521 KB)

    The usefulness of electrophotographic exposure sensitometry as a means of characterizing and evaluating new photoconductor materials has been extended by coupling the experiment to an on-line computer. This automated system provides several new functional capabilities not realistically attainable in manual operation and drastically reduces the time lag in the exchange of information between resear... View full abstract»

    Full text access may be available. Click article title to sign in or learn about subscription options.
  • Dimensional Measurement and Defect Detection Using Spatial Filtering

    Publication Year: 1973, Page(s):509 - 518
    Cited by:  Patents (6)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (581 KB)

    A new method is described that utilizes coherent bandpass spatial filtering and subsequent superposition to form filtered images in which small differences in size and geometry of the original object are readily detected. The theoretical basis is discussed and experiments described in which signal ratios of about 10:1 are obtained for a diameter change of 2.5 percent of a clear circular disc. The ... View full abstract»

    Full text access may be available. Click article title to sign in or learn about subscription options.
  • Optical Techniques for Measurement of Chamber Spacing

    Publication Year: 1973, Page(s):519 - 524
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (419 KB)

    Two optical methods were investigated for accurately measuring the gap, or chamber spacing, that separates two closely spaced transparent plates. The first method uses a special microscope in which the main feature is a unit-magnification catadioptric system that gives an aberration-free image of the chamber outside the plates, where it is accessible to a high-power objective. The second method is... View full abstract»

    Full text access may be available. Click article title to sign in or learn about subscription options.
  • Logical Reversibility of Computation

    Publication Year: 1973, Page(s):525 - 532
    Cited by:  Papers (301)  |  Patents (1)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (496 KB)

    The usual general-purpose computing automaton (e.g., a Turing machine) is logically irreversible—its transition function lacks a single-valued inverse. Here it is shown that such machines may be made logically reversible at every step, while retaining their simplicity and their ability to do general computations. This result is of great physical interest because it makes plausible the exist... View full abstract»

    Full text access may be available. Click article title to sign in or learn about subscription options.
  • Approximating Pre-emptive Priority Dispatching in a Multiprogramming Model

    Publication Year: 1973, Page(s):533 - 539
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (433 KB)

    The formulation of the closed queuing network model of a multiprogramming computer system is generalized to allow each task to have its own set of facility service rates and I/O device selection probability distribution. In the model, processor sharing is assumed for different types of customers. It is shown through a series of investigations that the model reasonably approximates pre-emptive prio... View full abstract»

    Full text access may be available. Click article title to sign in or learn about subscription options.
  • Recent papers by IBM authors

    Publication Year: 1973, Page(s):540 - 542
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (346 KB)

    Reprints of the papers listed here may usually be obtained by writing directly to the authors. The authors' IBM divisions are identified as follows:ASDD is the Advanced Systems Development Division; DPD, Data Processing Division; FED, Field Engineering Division; FSD, Federal Systems Division; GPD, General Products Division; GSD, General Systems Division; OPD, Office Products Division; RES, Researc... View full abstract»

    Full text access may be available. Click article title to sign in or learn about subscription options.
  • Recent IBM patents

    Publication Year: 1973, Page(s):543 - 545
    IEEE is not the copyright holder of this material | PDF file iconPDF (279 KB)
    Freely Available from IEEE
  • Authors

    Publication Year: 1973, Page(s):546 - 547
    IEEE is not the copyright holder of this material | PDF file iconPDF (265 KB)
    Freely Available from IEEE
  • Author Index for Volume 17

    Publication Year: 1973, Page(s):548 - 549
    IEEE is not the copyright holder of this material | PDF file iconPDF (271 KB)
    Freely Available from IEEE
  • Subject Index for Volume 17

    Publication Year: 1973, Page(s):550 - 552
    IEEE is not the copyright holder of this material | PDF file iconPDF (243 KB)
    Freely Available from IEEE
  • Contents of previous issues in Volume 17

    Publication Year: 1973, Page(s):553 - 555
    IEEE is not the copyright holder of this material | PDF file iconPDF (258 KB)
    Freely Available from IEEE

Aims & Scope

The IBM Journal of Research and Development is a peer-reviewed technical journal, published bimonthly, which features the work of authors in the science, technology and engineering of information systems.

Learn about subscribing to this journal >

Full Aims & Scope

Meet Our Editors

Editor-in-Chief
Clifford A. Pickover
IBM T. J. Watson Research Center