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IBM Journal of Research and Development

Issue 5 • Date Sep. 1980

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Displaying Results 1 - 16 of 16
  • Pattern Partitioning for Enhanced Proximity-Effect Corrections in Electron-Beam Lithography

    Publication Year: 1980, Page(s):530 - 536
    Cited by:  Patents (1)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (639 KB)

    This paper presents new algorithms for judicious partitioning (or subdivision) of arbitrary lithographic patterns in order to achieve increased quality of proximity-effect correction as well as increased efficiency in the computation of such corrections. Experimental results verifying the correctness of such algorithms are also presented. View full abstract»

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  • Proximity Correction Enhancements for 1-µm Dense Circuits

    Publication Year: 1980, Page(s):537 - 544
    Cited by:  Papers (4)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (629 KB)

    The proximity effect in electron-beam lithography, which is due to electron scattering in the resist and wafer, results in nonuniform exposure and development for patterns in which the incident doses of all the shapes are the same. Correction for this effect has been accomplished in the past primarily by varying the incident doses of all the shapes in order to achieve an equal average resultant do... View full abstract»

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  • Registration Mark Detection for Electron-Beam Lithography—EL1 System

    Publication Year: 1980, Page(s):545 - 553
    Cited by:  Papers (2)  |  Patents (5)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (681 KB)

    In electron-beam lithography for the direct exposure of wafers for integrated circuit manufacturing, accurate registration is necessary to achieve the required pattern overlay. This paper examines elements that should be considered to optimize the registration mark detection process in an automatic registration system for an e-beam lithography tool such as IBM's EL1. Included is a section on the g... View full abstract»

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  • Electron-Beam Resists for Lift-Off Processing with Potential Application to Josephson Integrated Circuits

    Publication Year: 1980, Page(s):554 - 562
    Cited by:  Papers (2)  |  Patents (1)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (852 KB)

    Several electron-beam resists suitable for lift-off processing have been investigated with particular attention to the requirements for fabricating Pb-alloy Josephson integrated circuits. The desired resist must perform well with a baking temperature near 70°C, provide a reproducible undercut edge profile with good linewidth control, and adhere to the necessary substrates. Diazo resists as ... View full abstract»

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  • Estimation of State Probabilities Using the Maximum Entropy Principle

    Publication Year: 1980, Page(s):563 - 569
    Cited by:  Papers (2)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (479 KB)

    A simple method is derived for computing state probabilities of a system when the probabilities of certain aggregate states are known. The method is based on maximizing the system entropy. It is shown that the results obtained by the method satisfy certain assumptions on statistical independence between events. The method is applied to a problem arising in computer performance analysis. View full abstract»

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  • Variance Reduction Techniques for the Simulation of Markov Processes, I: Multiple Estimates

    Publication Year: 1980, Page(s):570 - 581
    Cited by:  Papers (1)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (933 KB)

    A method for reducing the variance of simulation-generated estimates is proposed and discussed. The method may be applied to the estimation of steady state parameters of discrete and continuous time Markov chains, semi-Markov processes, and regenerative discrete time Markov processes on a general state space (such as the waiting time process in a multiple-server queue). The method is similar to th... View full abstract»

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  • Fleshing Out Wire Frames

    Publication Year: 1980, Page(s):582 - 597
    Cited by:  Papers (27)  |  Patents (3)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (1186 KB)

    Given a polyhedral object, its wire frame is the set of its edges and vertices. In this paper, we present an algorithm which discovers all objects with a given wire frame. This algorithm, which has a number of applications to mechanical design besides being of mathematical interest, has been implemented and has performed well on complex objects. View full abstract»

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  • Digital System for Convergence of Three-Beam High-Resolution Color Data Displays

    Publication Year: 1980, Page(s):598 - 611
    Cited by:  Papers (1)  |  Patents (4)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (883 KB)

    This paper describes a new method of generating and adjusting convergence waveforms required by a delta-gun cathode-ray tube for digital color data display applications to ensure that the primary color images produced by three guns are correctly registered with respect to each other. The display is divided into 480 zones, and a number of correction values are associated with each zone. Digital val... View full abstract»

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  • Macro Generation Algorithms for LSI Custom Chip Design

    Publication Year: 1980, Page(s):612 - 621
    Cited by:  Papers (5)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (808 KB)

    Presented in this paper are macro generation algorithms which have been developed and implemented for the optimization of physical and electrical designs of LSI macro circuits. Any type of logical macro circuit for a custom chip design can be automatically generated and optimized through the use of the concepts and numerical techniques for algorithmic layout generation and electrical network desig... View full abstract»

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  • Integral Point-Matching Method for Two-Dimensional Laplace Field Problems with Periodic Boundaries

    Publication Year: 1980, Page(s):622 - 630
    Cited by:  Papers (2)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (612 KB)

    An integral point-matching technique is applied to two-dimensional Laplacian fields between periodic boundaries. This formulation leads to an algorithm that reduces the size of the matrix, economizing on computer workspace and inversion time. Several example problems solved on an APL terminal system are included. View full abstract»

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  • Silicon Torsional Scanning Mirror

    Publication Year: 1980, Page(s):631 - 637
    Cited by:  Papers (42)  |  Patents (95)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (584 KB)

    Conventional batch photolithography and thin film techniques are employed to fabricate an electrostatically driven torsional scanning mirror from single-crystal silicon. This device is extremely simple to make and operate, has operational characteristics comparable to commercial magnetically driven high-frequency scanners, and has exhibited a promising reliability. View full abstract»

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  • A General Method for Channel Coding

    Publication Year: 1980, Page(s):638 - 641
    Cited by:  Papers (16)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (280 KB)

    A procedure is described for constructing minimum delay codes for discrete noiseless channels. The method is based on a simple recursive algorithm for finding a set of coding paths. View full abstract»

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  • Recent Papers by IBM Authors

    Publication Year: 1980, Page(s):642 - 649
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (659 KB)

    Reprints of the papers listed here may usually be obtained by writing directly to the authors. The authors' IBM divisions are identified as follows: CHQ is Corporate Headquarters; DPD, Data Processing Division; DSD, Data Systems Division; FED, Field Engineering Division; FSD, Federal Systems Division; GPD, General Products Division; GSD, General Systems Division; GTD, General Technology Division; ... View full abstract»

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  • Recent IBM Patents

    Publication Year: 1980, Page(s):650 - 652
    IEEE is not the copyright holder of this material | PDF file iconPDF (216 KB)
    Freely Available from IEEE
  • Authors

    Publication Year: 1980, Page(s):653 - 655
    IEEE is not the copyright holder of this material | PDF file iconPDF (308 KB)
    Freely Available from IEEE
  • Errata

    Publication Year: 1980, Page(s): 656
    IEEE is not the copyright holder of this material | PDF file iconPDF (77 KB)
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The IBM Journal of Research and Development is a peer-reviewed technical journal, published bimonthly, which features the work of authors in the science, technology and engineering of information systems.

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Editor-in-Chief
Clifford A. Pickover
IBM T. J. Watson Research Center