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# Journal of Microelectromechanical Systems

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Displaying Results 1 - 22 of 22

Publication Year: 2009, Page(s):C1 - C4
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• ### Journal of Microelectromechanical Systems publication information

Publication Year: 2009, Page(s): C2
| PDF (39 KB)
• ### A Sensing Device Using Liquid Crystal in a Micropillar Array Supporting Structure

Publication Year: 2009, Page(s):973 - 982
Cited by:  Papers (18)  |  Patents (1)
| | PDF (1822 KB) | HTML

We present the design of a micropillar array that leads to the formation of stable and uniform liquid crystal (LC) thin films for sensing applications. Photolithography and electroplating methods were employed to fabricate the micropillar array. By using this microfabricated structure, thin films of LC (5CB: 4'-pentyl-4-cyanobiphenyl) were formed and stabilized against gravitational forces and mec... View full abstract»

• ### MEMS Electric-Field Probes for Laboratory Plasmas

Publication Year: 2009, Page(s):983 - 989
Cited by:  Papers (2)
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This paper presents microfabricated sensors for directly measuring fine-scale plasma parameters in typical laboratory plasmas. Microfabricated probes have the potential to significantly advance basic plasma physics by enabling the measurement of fundamental processes under controlled conditions. Historically, the spatial scales of the finest electromagnetic-field fluctuations in laboratory plasmas... View full abstract»

• ### A Liquid–Solid Direct Contact Low-Loss RF Micro Switch

Publication Year: 2009, Page(s):990 - 997
Cited by:  Papers (12)  |  Patents (3)
| | PDF (1197 KB) | HTML

This paper reports the design, fabrication, and testing of a liquid-metal (LM) droplet-based radio-frequency microelectromechanical systems (RF MEMS) shunt switch with dc-40 GHz performance. The switch demonstrates better than 0.3 dB insertion loss and 20 dB isolation up to 40 GHz, achieving significant improvements over previous LM-based RF MEMS switches. The improvement is attributed to use of e... View full abstract»

• ### A Nanoparticle Doped Micro-Geiger Counter for Multispecies Radiation Detection

Publication Year: 2009, Page(s):998 - 1003
Cited by:  Papers (1)
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This paper reports on a multichannel radiation detection platform enabled with nanoparticles that is capable of detecting and discriminating all types of radiation emitted from fissionable bomb making materials. Typical Geiger counters are limited to detecting only beta and gamma radiation. The micro-Geiger counter reported here detects all species of radiation including beta particles, gamma/X ra... View full abstract»

• ### An Electrothermal Tip–Tilt–Piston Micromirror Based on Folded Dual S-Shaped Bimorphs

Publication Year: 2009, Page(s):1004 - 1015
Cited by:  Papers (48)  |  Patents (2)
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This paper presents the design, optimization, fabrication, and test results of an electrothermally actuated tip-tilt-piston micromirror with a large optical aperture of 1 mm. The fabrication of the device is a combination of thin-film surface micromachining and bulk silicon micromachining based on silicon-on-insulator wafers. The device has 3-DOF of actuations, including rotations around two axes ... View full abstract»

• ### A Numerical Fatigue Damage Model for Life Scatter of MEMS Devices

Publication Year: 2009, Page(s):1016 - 1031
Cited by:  Papers (11)
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This paper presents a fatigue damage model to estimate fatigue lives of microelectromechanical systems (MEMS) devices and account for the effects of topological randomness of material microstructure. For this purpose, the damage mechanics modeling approach is incorporated into a new Voronoi finite-element model (VFEM). The VFEM developed for this investigation is able to consider both intergranula... View full abstract»

• ### Optimization of Comb-Driven Devices for Mechanical Testing of Polymeric Nanofibers Subjected to Large Deformations

Publication Year: 2009, Page(s):1032 - 1046
Cited by:  Papers (14)  |  Patents (1)
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Comb-driven electrostatic actuators applied to mechanical testing of nanostructures are usually designed by a ldquobrute-forcerdquo approach for maximum electrostatic-force output, which results in limited actuation range. This issue is more prevalent when testing soft nanofibers with large ductility. In this paper, the design considerations for a comb-driven platform for nanoscale mechanical test... View full abstract»

• ### Dual-Chirality Helical Nanobelts: Linear-to-Rotary Motion Converters for Three-Dimensional Microscopy

Publication Year: 2009, Page(s):1047 - 1053
Cited by:  Papers (13)
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A linear-to-rotary motion converter is demonstrated using 3-D SiGe/Si dual-chirality helical nanobelts (DCHNBs). Analytical and experimental investigation shows that the motion conversion has excellent linearity for small deflections. The conversion ratios of displacement and load for a SiGe/Si DCHNB (an 8-nm-thick Si0.6Ge0.4 and a 10-nm-thick Si layer) are found to be 171.3d... View full abstract»

• ### Characterization of High-Pressure $hbox{XeF}_{2}$ Vapor-Phase Silicon Etching for MEMS Processing

Publication Year: 2009, Page(s):1054 - 1061
Cited by:  Papers (13)
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Typical release for structures in microelectromechanical systems (MEMS) devices requires the use of sacrificial layers and wet etchants. As an alternative, bulk Si can be utilized for nonsilicon MEMS or structures as the sacrificial material when exposed to vapor-phase XeF2 . This paper presents the results of using relatively high pressures (> 3.0 torr) for the purpose of MEMS proce... View full abstract»

• ### Wafer-Scale Microtensile Testing of Thin Films

Publication Year: 2009, Page(s):1062 - 1076
Cited by:  Papers (21)
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This paper reports on the mechanical characterization of thin films using the microtensile technique performed for the first time at the wafer scale. Multiple test structures are processed and sequentially measured on the same silicon substrate, thus eliminating delicate handling of individual samples. The current layout uses 26 test structures evenly distributed over a 4-in wafer, each of them ca... View full abstract»

• ### Enhancing Parametric Sensitivity in Electrically Coupled MEMS Resonators

Publication Year: 2009, Page(s):1077 - 1086
Cited by:  Papers (40)  |  Patents (3)
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In an array of identical resonators coupled through weak springs, a small perturbation in the structural properties of one of the resonators strongly impacts coupled oscillations causing the vibration modes to localize. Theoretical studies show that measuring the variation in eigenstates due to such vibration-mode localization can yield orders of magnitude enhancement in signal sensitivity over th... View full abstract»

• ### Viscoelastic Characterization and Modeling of Polymer Transducers for Biological Applications

Publication Year: 2009, Page(s):1087 - 1099
Cited by:  Papers (29)  |  Patents (1)
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Polydimethylsiloxane (PDMS) is an important polymeric material widely used in bio-MEMS devices such as micropillar arrays for cellular mechanical force measurements. The accuracy of such a measurement relies on choosing an appropriate material constitutive model for converting the measured structural deformations into corresponding reaction forces. However, although PDMS is a well-known viscoelast... View full abstract»

• ### Microsized Piston-Cylinder Pneumatic and Hydraulic Actuators Fabricated by Lithography

Publication Year: 2009, Page(s):1100 - 1104
Cited by:  Papers (14)  |  Patents (1)
| | PDF (570 KB) | HTML

Future microrobotic applications require actuators that can generate a high actuation force in a limited volume. Up to now, little research has been performed on the development of pneumatic or hydraulic microactuators, although they offer great prospects in achieving high force densities. In addition, large actuation strokes and high actuation speeds can be achieved by these actuators. This paper... View full abstract»

• ### A Model for Electrostatic Actuation in Conducting Liquids

Publication Year: 2009, Page(s):1105 - 1117
Cited by:  Papers (6)
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This paper presents a generalized model that describes the behavior of micromachined electrostatic actuators in conducting liquids and provides a guideline for designing electrostatic actuators to operate in aqueous electrolytes such as biological media. The model predicts static actuator displacement as a function of device parameters and applied frequency and potential for the typical case of ne... View full abstract»

• ### Waveform Design Methods for Piezo Inkjet Dispensers Based on Measured Meniscus Motion

Publication Year: 2009, Page(s):1118 - 1125
Cited by:  Papers (34)
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Waveform design methods for piezo inkjet dispensers based on measured meniscus motion are presented. The meniscus motion is measured from charge-coupled-device camera images wherein strobe lights from light-emitting diodes are synchronized with the jetting signal. Waveforms for the piezo dispenser are designed such that the number of experiments can be significantly reduced compared to conventiona... View full abstract»

• ### Analysis of Hybrid Electrothermomechanical Microactuators With Integrated Electrothermal and Electrostatic Actuation

Publication Year: 2009, Page(s):1126 - 1136
Cited by:  Papers (14)
| | PDF (871 KB) | HTML

The goal of this paper is to integrate electrothermal and electrostatic actuations in microelectromechanical systems (MEMS). We look at cases where these two types of actuation are intimately coupled and argue that such integrated electrothermomechanical (ETM) microactuators have more advantages than pure electrothermal or electrostatic devices. We further propose a framework to model hybrid ETM a... View full abstract»

• ### A Computational Design Methodology for Assembly and Actuation of Thin-Film Structures via Patterning of Eigenstrains

Publication Year: 2009, Page(s):1137 - 1148
Cited by:  Papers (6)
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We develop a computational approach to design 3-D structures that can be fabricated and then assembled and/or actuated by spatially tailoring the layout of multilayer films with eigenstrains. Eigenstrains are stress-free strains when they occur in an unconstrained solid. They are almost an inevitable companion, albeit often unwanted, of thin-film processes. When they vary through the thickness, th... View full abstract»

• ### Characterization of Stiction Accrual in a MEMS

Publication Year: 2009, Page(s):1149 - 1159
Cited by:  Papers (4)
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Stiction remains one of the chief reliability concerns for microelectromechanical systems (MEMS) devices. In this paper, we quantify and analyze the rate of accrual of stiction in a standard MEMS device under a set of controlled temperature and humidity splits. An accelerated aging system was employed to more rapidly induce stiction in the MEMS. Optical characterization techniques were used to stu... View full abstract»

• ### 2010 Solid-state, actuator and microsystems workshop, Hilton Head

Publication Year: 2009, Page(s): 1160
| PDF (411 KB)
• ### MEMS2010 Hong Kong

Publication Year: 2009, Page(s): C3
| PDF (400 KB)

## Aims & Scope

The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.

Full Aims & Scope

## Meet Our Editors

Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems