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Semiconductor Manufacturing, IEEE Transactions on

Early Access Articles

Early Access articles are new content made available in advance of the final electronic or print versions and result from IEEE's Preprint or Rapid Post processes. Preprint articles are peer-reviewed but not fully edited. Rapid Post articles are peer-reviewed and edited but not paginated. Both these types of Early Access articles are fully citable from the moment they appear in IEEE Xplore.

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Aims & Scope

IEEE Transactions on Semiconductor Manufacturing addresses innovations of interest to the integrated circuit manufacturing researcher and professional.

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Meet Our Editors

Editor-in-Chief
Dr. Sean P. Cunningham
Intel Corporation
RN4-80
2200 Mission College Boulevard
Santa Clara, CA  95054  95054  USA
sean.p.cunningham@intel.com
Phone:+1 408-653-5955

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