Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Issue 4 • Date Jul 2009
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Displaying Results 1 - 25 of 84
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Low temperature grown polycrystalline
La0.7Sr0.3MnO3 thin films on amorphousSiO2 substrates by rf magnetron sputtering
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PDF (621 KB)
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Surface effects on the luminescence degradation of hydride vapor-phase epitaxy-grown GaN induced by electron-beam irradiation
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PDF (279 KB)
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Large crystal grain niobium thin films deposited by energetic condensation in vacuum arc
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PDF (738 KB)
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Relationship between gas-phase chemistries and surface processes in fluorocarbon etch plasmas: A process rate model
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PDF (1496 KB)
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Effect of cesium assistance on the electrical and structural properties of indium tin oxide films grown by magnetron sputtering
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PDF (399 KB)
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Rotation magnet sputtering: Damage-free novel magnetron sputtering using rotating helical magnet with very high target utilization
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PDF (770 KB)
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Particle-induced x-ray emission in stainless steel using
30 keV Ga+ focused ion beams |
PDF (294 KB)
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Establishment of very uniform gas-flow pattern in the process chamber for microwave-excited high-density plasma by ceramic shower plate
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PDF (898 KB)
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Silicon-oxide-high-
κ -oxide-silicon memory using a high-κ Y2O3 nanocrystal film for flash memory application |
PDF (614 KB)
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Effects of interelectrode gap on high frequency and very high frequency capacitively coupled plasmas
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PDF (748 KB)
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Nitrogen stabilized reactive sputtering of optimized
TiO2-x photocatalysts with visible light reactivity |
PDF (390 KB)
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Nucleation and growth of tantalum nitride atomic layer deposition on
Al2O3 using TBTDET and hydrogen radicals |
PDF (551 KB)
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Physical and optical properties of room temperature microwave plasma anodically grown
TiO2 |
PDF (415 KB)
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Ge nanocrystals embedded in a
GeOx matrix formed by thermally annealing of Ge oxide films |
PDF (395 KB)
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Scanning Auger of a specific via interface in an integrated circuit using a novel focused ion beam sample preparation technique
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PDF (679 KB)
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X-ray photoelectron spectroscopy analysis of organic materials etched by charged water droplet impact
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PDF (506 KB)
Aims & Scope
The Journal of Vacuum Science and Technology A is devoted to reports of original research, review articles, and Critical Review articles.
Meet Our Editors
Editor
G. Lucovsky
North Carolina State University
