Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Issue 3 • Date May 2007
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Displaying Results 1 - 25 of 88
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Issue Cover
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PDF (21 KB)
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Issue Table of Contents
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PDF (142 KB)
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Properties of Fe-doped, thick, freestanding GaN crystals grown by hydride vapor phase epitaxy
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PDF (113 KB)
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Comprehensive investigation on emitter ledge length of
InGaP/GaAs heterojunction bipolar transistors |
PDF (157 KB)
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Crystallographic wing tilt and thermal-stress distribution of GaN laterally overgrown on maskless V-grooved sapphire substrate by metal-organic chemical vapor deposition
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PDF (239 KB)
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Experimental investigation of micro-mesoscale Knudsen compressor performance at low pressures
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PDF (531 KB)
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Etch mechanisms of hybrid low-
k material (SiOCH with porogen) in fluorocarbon based plasma |
PDF (298 KB)
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Fabrication of GaN suspended photonic crystal membranes and resonant nanocavities on Si(111)
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PDF (233 KB)
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Manufacturing method for the fabrication of sub-
50 nm current-perpendicular-to-plane spin valve sensors |
PDF (316 KB)
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Low-damage fabrication of high aspect nanocolumns by using neutral beams and ferritin-iron-core mask
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PDF (555 KB)
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Study of photoresist etching and roughness formation in electron-beam generated plasmas
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PDF (218 KB)
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Aims & Scope
The Journal of Vacuum Science and Technology B is devoted to reports of original research, review articles, and Critical Review articles.
Meet Our Editors
Editor
Gary E. McGuire
International Technology Center
