Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Issue 2 • Date Mar 2000
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Displaying Results 1 - 25 of 103
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Issue Cover
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PDF (5 KB)
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Issue Table of Contents
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PDF (37 KB)
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Fabrication of a silicon based nanometric oscillator with a tip form mass for scanning force microcopy operating in the GHz range
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PDF (731 KB)
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High resolution sampling electrostatic force microscopy using pulse width modulation technique
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PDF (328 KB)
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Point contact current–voltage measurements on individual organic semiconductor grains by conducting probe atomic force microscopy
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PDF (182 KB)
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Search of optimum bias voltage for oxide patterning on Si using scanning tunneling microscopy in air
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PDF (698 KB)
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Optical emission spectroscopy of microscopic gas discharges using a high-pressure scanning tunneling microscope
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PDF (85 KB)
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Atomic force microscope tip sharpening and evaluation by electric field confinement using a metal grid close to the tip
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PDF (483 KB)
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Atom-by-atom analysis of diamond, graphite, and vitreous carbon by the scanning atom probe
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PDF (494 KB)
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Field emission properties of carbon nanotubes
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PDF (1222 KB)
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Stability of low-temperature amorphous silicon thin film transistors formed on glass and transparent plastic substrates
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PDF (221 KB)
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Effect of post-nitride-passivation processing on the long-term stability of polysilicon integrated circuit resistors
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PDF (60 KB)
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Reduction of sidewall defect induced leakage currents by the use of nitrided field oxides in silicon selective epitaxial growth isolation for advanced ultralarge scale integration
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PDF (753 KB)
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Apparent depths of B and Ge deltas in Si as measured by secondary ion mass spectrometry
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PDF (169 KB)
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Effect of lateral dimensional scaling on the thermal stability of thin
CoSi2 layers reacted on polycrystalline silicon |
PDF (236 KB)
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Aims & Scope
The Journal of Vacuum Science and Technology B is devoted to reports of original research, review articles, and Critical Review articles.
Meet Our Editors
Editor
Gary E. McGuire
International Technology Center
