Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Issue 2 • Date Mar 1996
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Displaying Results 1 - 25 of 203
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Issue Table of Contents
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PDF (93 KB)
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Nanocluster formation by spin coating: Quantitative atomic force microscopy and Rutherford backscattering spectrometry analysis
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PDF (172 KB)
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Microfabrication of near‐field optical probes
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PDF (585 KB)
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Scanning force microscopy for the study of domain structure in ferroelectric thin films
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PDF (364 KB)
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Ballistic electron emission microscopy studies of electron scattering in Au/GaAs Schottky diodes damaged by focused ion beam implantation
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PDF (255 KB)
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Application of phase‐sensitive photoreflectance spectroscopy to a study of undoped AlGaAs/GaAs quantum well structures
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PDF (136 KB)
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Nonlinear characteristics induced by carrier accumulation in InAs/GaAs superlattice cap layer on GaAs/GaAlAs multi‐quantum well structure
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PDF (82 KB)
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High‐temperature stable Ir–Al/n‐GaAs Schottky diodes: Effect of the barrier height controlling
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PDF (108 KB)
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Properties of TaN
x films as diffusion barriers in the thermally stable Cu/Si contact systems |
PDF (89 KB)
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MxP+: A new dielectric etcher with enabling technology, high productivity, and low cost‐of‐consumables
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PDF (433 KB)
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Effect of fluorine concentration on the etch characteristics of fluorinated tetraethylorthosilicate films
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PDF (99 KB)
Aims & Scope
The Journal of Vacuum Science and Technology B is devoted to reports of original research, review articles, and Critical Review articles.
Meet Our Editors
Editor
Gary E. McGuire
International Technology Center
