Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Issue 4 • Date Jul 1999
Filter Results
Displaying Results 1 - 25 of 230
-
-
Characterization of silicon oxynitride thin films by x-ray photoelectron spectroscopy
|
PDF (117 KB)
-
Valence band x-ray photoelectron spectroscopic studies to distinguish between oxidized aluminum species
|
PDF (144 KB)
-
-
Optical and structural characterization of copper-based colloidal particles in
SiO2 coatings |
PDF (115 KB)
-
Role of surface chemistry on the nature of passive oxide film growth on Fe–Cr (low and high) steels at high temperatures
|
PDF (462 KB)
-
Improvements to the analysis of x-ray photoelectron spectra using a maximum entropy method for deconvolution
|
PDF (115 KB)
-
-
Quantitative high-resolution imaging with sputter-initiated resonance ionization spectroscopy
|
PDF (252 KB)
-
Secondary ion mass spectrometry of deep trench capacitors in dynamic random access memory
|
PDF (173 KB)
-
Nitrogen incorporation and trace element analysis of nanocrystalline diamond thin films by secondary ion mass spectrometry
|
PDF (109 KB)
-
Atomic force microscopy observation of human lymphoid cells chronically infected with the human immunodeficiency virus
|
PDF (535 KB)
-
Fundamental issues in wafer bonding
|
PDF (1009 KB)
-
Reduced carbon contaminant, low-temperature silicon substrate preparation for “defect-free” homoepitaxy
|
PDF (243 KB)
-
Process optimization of dielectrics chemical mechanical planarization processes for ultralarge scale integration multilevel metallization
|
PDF (906 KB)
-
Studies on passivation behavior of tungsten in application to chemical mechanical polishing
|
PDF (119 KB)
-
Low damage dry etching of III–V materials for heterojunction bipolar transistor applications using a chlorinated inductively coupled plasma
|
PDF (754 KB)
-
Comparison of morphology and interfacial composition of Pd ultrathin films on 6H–SiC and 4H–SiC at different annealing temperatures
|
PDF (1369 KB)
-
-
-
Side-wall damage in a transmission electron microscopy specimen of crystalline Si prepared by focused ion beam etching
|
PDF (251 KB)
-
-
Effects of variously configured magnets on the characteristics of inductively coupled plasmas
|
PDF (178 KB)
-
-
Aims & Scope
The Journal of Vacuum Science and Technology A is devoted to reports of original research, review articles, and Critical Review articles.
Meet Our Editors
Editor
G. Lucovsky
North Carolina State University
