Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Issue 3 • Date May 2007
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Displaying Results 1 - 25 of 40
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Issue Cover
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PDF (19 KB)
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Issue Table of Contents
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PDF (79 KB)
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Passivation layer on polyimide deposited by combined plasma immersion ion implantation and deposition and cathodic vacuum arc technique
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PDF (278 KB)
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Thermal stability of nonhydrogenated multilayer amorphous carbon prepared by the filtered cathodic vacuum arc technique
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PDF (74 KB)
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Influence of the positive ion composition on the ion-assisted chemical etch yield of
SrTiO3 films inAr/SF6 plasmas |
PDF (132 KB)
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Reactive and anisotropic etching of magnetic tunnel junction films using pulse-time-modulated plasma
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PDF (317 KB)
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Infrared absorber for pyroelectric detectors
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PDF (255 KB)
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Identification of important growth parameters for the development of high quality
Alx≫0.5Ga1-xN grown by metal organic chemical vapor deposition |
PDF (945 KB)
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Fluorine content of SiOF films as determined by IR spectroscopy and resonant nuclear reaction analysis
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PDF (108 KB)
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Structural and electrical characteristics of microcrystalline silicon prepared by hot-wire chemical vapor deposition using a graphite filament
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PDF (203 KB)
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NiCr etching in a reactive gas
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PDF (568 KB)
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Zinc deposition experiments for validation of direct-simulation Monte Carlo calculations of rarefied internal gas flows
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PDF (228 KB)
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Mass fractionation of carbon and hydrogen secondary ions upon
Cs+ andO2+ bombardment of organic materials |
PDF (80 KB)
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Coverage dependent reaction of yttrium on silicon and the oxidation of yttrium silicide investigated by x-ray photoelectron spectroscopy
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PDF (189 KB)
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Improvement of corrosion resistance of transparent conductive multilayer coating consisting of silver layers and transparent metal oxide layers
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PDF (191 KB)
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Compound semiconductor bonded to AlN heat spreader substrate using graded intermediate layer
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PDF (101 KB)
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Combined filtered cathodic arc etching pretreatment–magnetron sputter deposition of highly adherent CrN films
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PDF (571 KB)
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Residence times of water molecules on stainless steel and aluminum surfaces in vacuum and atmosphere
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PDF (156 KB)
Aims & Scope
The Journal of Vacuum Science and Technology A is devoted to reports of original research, review articles, and Critical Review articles.
Meet Our Editors
Editor
G. Lucovsky
North Carolina State University
