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# Journal of Microelectromechanical Systems

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Displaying Results 1 - 25 of 28

Publication Year: 2008, Page(s):C1 - C4
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• ### Journal of Microelectromechanical Systems publication information

Publication Year: 2008, Page(s): C2
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• ### Energy Harvesters Driven by Broadband Random Vibrations

Publication Year: 2008, Page(s):1061 - 1071
Cited by:  Papers (93)  |  Patents (1)
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Simple analytical models have proved very useful in understanding vibration energy harvesters driven by a sinusoidal acceleration. Corresponding analyses for broadband excitations have been absent. In this paper, we present new closed-form results on the output power, proof mass displacement, and optimal load of linear resonant energy harvesters driven by broadband vibrations. Output power depende... View full abstract»

• ### Voltage Control of the Resonance Frequency of Dielectric Electroactive Polymer (DEAP) Membranes

Publication Year: 2008, Page(s):1072 - 1081
Cited by:  Papers (34)  |  Patents (1)
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We report on the characterization, active tuning, and modeling of the first mode resonance frequency of dielectric electroactive polymer (DEAP) membranes. Unlike other resonance frequency tuning techniques, the tuning procedure presented here requires no external actuators or variable elements. Compliant electrodes were sputtered or implanted on both sides of 20-35-mum-thick and 2-4-mm-diameter po... View full abstract»

• ### Snap-Action Bistable Micromechanisms Actuated by Nonlinear Resonance

Publication Year: 2008, Page(s):1082 - 1093
Cited by:  Papers (33)  |  Patents (3)
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This paper presents analysis, design, realization, and experimental demonstration of a bistable switch actuated dynamically utilizing mechanical resonance phenomenon. We demonstrated that if a bistable structure is driven into a resonance near one of its states, it may achieve a large enough amplitude of vibration, sufficient to switch between its stable states. Using energy analysis, we concluded... View full abstract»

• ### Phase-Change Materials in Optically Triggered Microactuators

Publication Year: 2008, Page(s):1094 - 1103
Cited by:  Papers (7)
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Phase-change materials have been extensively used for optical data storage in commercial rewritable compact disks and digital video disks. These materials are also widely considered for next-generation phase-change random access memories to replace current Flash memories. We suggest a different application of phase-change materials in optically triggered microactuators. The suggested device consis... View full abstract»

• ### Row/Column Addressing Scheme for Large Electrostatic Actuator MEMS Switch Arrays and Optimization of the Operational Reliability by Statistical Analysis

Publication Year: 2008, Page(s):1104 - 1113
Cited by:  Papers (5)  |  Patents (1)
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This paper investigates the design and optimization of a row/column addressing scheme to individually pull in or pull out single electrostatic actuators in an N2 array, utilizing the electromechanical hysteresis behavior of electrostatic actuators and efficiently reducing the number of necessary control lines from N2 complexity to 27 V. This paper illustrates the principle of... View full abstract»

• ### Toward Flexible Thermoelectric Flow Sensors: A New Technological Approach

Publication Year: 2008, Page(s):1114 - 1119
Cited by:  Papers (22)
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A new technological approach on thin flexible sensors is presented. As proof of concept, a thermoelectric flow sensor on a 10-mum-thick polyimide foil has been realized. The advantages of silicon as a thermoelectric material and the stability of low-pressure chemical vapor deposition (LPCVD)-silicon nitride as a protective coating are combined with the flexibility of polymer substrates. The thermo... View full abstract»

• ### Fracture Properties of LPCVD Silicon Nitride and Thermally Grown Silicon Oxide Thin Films From the Load-Deflection of Long $hbox{Si}_{3}hbox{N}_{4}$ and $hbox{SiO}_{2}/hbox{Si}_{3}hbox{N}_{4}$ Diaphragms

Publication Year: 2008, Page(s):1120 - 1134
Cited by:  Papers (13)
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The bulge test is successfully extended to the determination of the fracture properties of silicon nitride and oxide thin films. This is achieved by using long diaphragms made of silicon nitride single layers and oxide/nitride bilayers, and applying a comprehensive mechanical model that describes the mechanical response of the diaphragms under uniform differential pressure. The model is valid for ... View full abstract»

• ### Brownian Microscopy for Simultaneous In Situ Measurements of the Viscosity and Velocity Fields in Steady Laminar Microchannel Flows

Publication Year: 2008, Page(s):1135 - 1143
Cited by:  Papers (4)  |  Patents (1)
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Brownian microscopy is an intriguing technique that enables in situ determination of the local fluid properties and velocity fields in microfluidic devices. We report application of Brownian microscopy to steady laminar microchannel flows and demonstrate accurate measurements of the viscosity of glycerin/water mixtures, as well as the velocity profiles. A theoretical model is develop... View full abstract»

• ### Micron-Scale Friction and Sliding Wear of Polycrystalline Silicon Thin Structural Films in Ambient Air

Publication Year: 2008, Page(s):1144 - 1154
Cited by:  Papers (29)
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Micron-scale static friction and wear coefficients, surface roughness, and resulting wear debris have been studied for sliding wear in polycrystalline silicon in ambient air at micro- Newton normal loads using on-chip sidewall test specimens, fabricated with the Sandia SUMMiT VTM process. With increasing number of wear cycles friction coefficients increased by a factor of two up to a st... View full abstract»

• ### Characterization of Deformation Behaviors and Elastic Moduli of Multilayered Films in Piezoelectric Inkjet Head

Publication Year: 2008, Page(s):1155 - 1163
Cited by:  Papers (3)
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A bulge testing system was developed to mechanically characterize the deformation behaviors and elastic moduli of multilayered films, mainly composed of polycrystalline silicon (polysilicon) and lead zirconate titanate (PZT), used in a multilayer actuator of a piezoelectric inkjet head. In the tests, commercial inkjet heads including a few tens of multilayer actuators were directly pressurized by ... View full abstract»

• ### Combdrive Configuration for an Electromagnetic Reluctance Actuator

Publication Year: 2008, Page(s):1164 - 1171
Cited by:  Papers (3)
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This paper presents a novel combdrive configuration of a linear magnetic microactuator. We discuss in detail the influence of the air-gap geometry on the plunger motion and give design rules to avoid pull-in behavior. This analysis results in a new configuration, which is, so far, only known for electrostatic actuators. The magnetic flux is guided over several interdigitating comb structures with ... View full abstract»

• ### A Polymeric Paraffin Microactuator

Publication Year: 2008, Page(s):1172 - 1177
Cited by:  Papers (10)
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Paraffin wax is a promising material in microactuators not only because of its ability of producing large displacements and high forces at the same time but also because of the variety of manufacturing techniques available. In this paper, a simple actuator based on paraffin wax as the active material is fabricated and tested. Ultraviolet-curable epoxy is used in a technique combining simultaneous ... View full abstract»

• ### Flexible Polymer Sensors for In Vivo Intravascular Shear Stress Analysis

Publication Year: 2008, Page(s):1178 - 1186
Cited by:  Papers (30)
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Hemodynamic forces, specifically fluid shear stress, play an important role in the focal nature of arterial plaque formation known as atherosclerosis. We hereby developed biocompatible and flexible intravascular microelectromechanical systems sensor to measure real-time shear stress in the aortas of New Zealand white (NZW) rabbits. Titanium (Ti) and platinum (Pt) were deposited on silicon wafers a... View full abstract»

• ### A Hybrid Electrode Array With Built-In Position Sensors for an Implantable MEMS-Based Cochlear Prosthesis

Publication Year: 2008, Page(s):1187 - 1194
Cited by:  Papers (10)  |  Patents (1)
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A hybrid electrode array has been developed for use in an implantable MEMS-based cochlear prosthesis intended to restore hearing to the profoundly deaf. The array provides high-density stimulation and embedded position sensing to improve sound perception, minimize insertion damage, and optimize implant placement. Interfacing with a hermetically-packaged microcontroller and a bidirectional wireless... View full abstract»

• ### Development of a Latchable Microvalve Employing a Low-Melting-Temperature Metal Alloy

Publication Year: 2008, Page(s):1195 - 1203
Cited by:  Papers (17)
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We present the design, fabrication, and characterization of a latchable microvalve. The valve can be held in the on- or off-state without consuming power. A low-melting-temperature metal alloy provides structural support to hold the valve in place when latched. The metal alloy piece liquefies when it is heated above 62degC, allowing a pneumatic actuator to change the valve state. When the metal co... View full abstract»

• ### Simultaneous On-Chip Sensing and Actuation Using the Thermomechanical In-Plane Microactuator

Publication Year: 2008, Page(s):1204 - 1209
Cited by:  Papers (11)
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Many applications in microelectromechanical systems require physical actuation for implementation or operation. On-chip sensors would allow control of these actuators. This paper presents experimental evidence showing that a certain class of thermal actuators can be used simultaneously as an actuator and a sensor to control the actuator's force or displacement output. By measuring the current and ... View full abstract»

• ### Polydimethylsiloxane Microlens Arrays Fabricated Through Liquid-Phase Photopolymerization and Molding

Publication Year: 2008, Page(s):1210 - 1217
Cited by:  Papers (20)
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We report on polydimethylsiloxane (PDMS) microlens arrays fabricated through liquid-phase photopolymerization and molding. The gist of this fabrication process is to form liquid menisci of variable radii of curvature at an array of apertures through pneumatic control, followed by photopolymerization under ultraviolet radiance. The resultant polymerized structures are then transferred to PDMS utili... View full abstract»

• ### Tunable Pneumatic Microoptics

Publication Year: 2008, Page(s):1218 - 1227
Cited by:  Papers (29)  |  Patents (2)
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A new class of tunable and actuated microoptical devices is presented: pneumatic microoptics. Using microelectromechanical system fabrication technology extended by the use of polydimethylsiloxane (PDMS) membranes, tunable microlenses, and lens arrays, actuated micromirrors with large tilt angles and tip-tilt piston mirrors have been designed and fabricated. Actuation is by pressure: Gas- or liqui... View full abstract»

• ### Pull-In Analysis of Torsional Scanners Actuated by Electrostatic Vertical Combdrives

Publication Year: 2008, Page(s):1228 - 1238
Cited by:  Papers (10)
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This paper presents pull-in analysis of torsional MEMS scanners actuated by electrostatic vertical combdrives with general comb gap arrangements and cross sections. The analysis is based on a 2-DOF actuator with a single voltage control. Three failure modes of the scanners are identified as in-plane twist, transversal motion, and out-of-plane twist. For each failure mode, analytical expressions of... View full abstract»

• ### A Microcantilever-Based Picoliter Droplet Dispenser With Integrated Force Sensors and Electroassisted Deposition Means

Publication Year: 2008, Page(s):1239 - 1253
Cited by:  Papers (9)
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This paper introduces a picoliter droplet dispenser relying on an array of silicon microcantilevers. The microcantilevers bear fluidic channels, and liquid transfer is achieved by a direct contact of the cantilever tip and the surface. A high degree of control over the location and geometry of the fabricated patterns is ensured by incorporating force sensors and electroassisted deposition means, i... View full abstract»

• ### Liquid Aspiration and Dispensing Based on an Expanding PDMS Composite

Publication Year: 2008, Page(s):1254 - 1262
Cited by:  Papers (7)  |  Patents (1)
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In this paper, we present the development of active liquid aspiration and dispensing units designed for vertical, as well as lateral, liquid aspiration. The devices are based on a single-use thermally expanding polydimethylsiloxane (PDMS) composite, which allows altering its surface topography by means of individually addressable integrated heaters. Devices are designed in order to create an enclo... View full abstract»

• ### Silicon Field-Emission Devices Fabricated Using the Hydrogen Implantation–Porous Silicon (HI–PS) Micromachining Technique

Publication Year: 2008, Page(s):1263 - 1269
Cited by:  Papers (5)
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This paper presents a relatively simple method to fabricate field-emitter arrays from silicon substrates. These devices are obtained from silicon micromachining by means of the HI-PS technique - a combination of hydrogen ion implantation and porous silicon used as sacrificial layer. Also, a new process sequence is proposed and implemented to fabricate self-aligned integrated field-emission devices... View full abstract»

• ### Fabrication and Testing of a High-Speed Microscale Turbocharger

Publication Year: 2008, Page(s):1270 - 1282
Cited by:  Papers (7)
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A microelectromechanical system (MEMS) turbocharger has been designed, fabricated, and tested as part of a Massachusetts Institute of Technology program aimed at producing a microfabricated gas turbine engine for portable power applications. A gas turbine engine requires high-speed high-efficiency turbomachinery operating at tip speeds of several hundred meters per second. This MEMS turbocharger s... View full abstract»

## Aims & Scope

The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.

Full Aims & Scope

## Meet Our Editors

Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems