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IET Micro & Nano Letters

Issue 3 • September 2008

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Displaying Results 1 - 6 of 6
  • Wideband DC-contact MEMS series switch

    Publication Year: 2008, Page(s):66 - 69
    Cited by:  Papers (2)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (344 KB)

    The demonstration of a wideband DC-contact MEMS series switch on an alumina substrate is reported. The switch is based on a cantilever beam design. The tip of the cantilever beam was formed into a fork tip design, and its RF performance was measured and compared with a regular rectangular tip. This design reduced up-state capacitance from 10 to 3.8 fF. The beam with fork tip exhibited high isolati... View full abstract»

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  • MEMS microwave device with switchable capacitive and inductive states

    Publication Year: 2008, Page(s):77 - 81
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (367 KB)

    A microwave microelectromechanical system (MEMS) device that can be switched between capacitive and inductive states over the frequency range of 1 to 16 GHz is reported. The device has been designed based on coplanar waveguide architecture, and realised in thickly electroplated nickel with front-side bulk micromachining of the substrate using a commercial foundry process. The capacitive-to-inducti... View full abstract»

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  • Ultra-violet direct patterning of metal on polyimide

    Publication Year: 2008, Page(s):82 - 89
    Cited by:  Papers (2)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (519 KB)

    Copper micro-patterns have been fabricated on polyimide substrates by ultra-violet (UV) lithography without the use of evaporation techniques or photoresist materials. Using a photoreactive polymer-reducing agent, methoxy poly(ethylene glycol) (MPEG) as a thin film coating, a novel light-directed metal-patterning method in air atmosphere was realised. The interaction of UV light and MPEG in ethano... View full abstract»

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  • Gold-coated scanning probes for direct `write`of sub-micron metallic structures

    Publication Year: 2008, Page(s):90 - 94
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (442 KB)

    The fabrication and application of new gold-coated scanning probes (SPs) for direct 'write' of sub-micron metallic structures are reported. The SP consists of a base structure made of silicon nitride and a thin gold coating. The tip profile and radius of curvature are tightly controlled in the probe fabrication to ensure a predictable tip-substrate contact. By scanning a fabricated probe on a sing... View full abstract»

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  • Probabilistic analysis of micro-machined fixed-fixed beam for reliability

    Publication Year: 2008, Page(s):95 - 100
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (545 KB)

    A realistic approach for modelling a fixed-fixed beam is presented. The use of probabilistic methods to assess the electromechanical behaviour of the beam under the presence of micro-machine manufacturing and process uncertainties is demonstrated. A finite-element model of the beam is constructed using the commercial code ANSYS (10.0). In the standard approach of modelling, existing literature ass... View full abstract»

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  • Application of nanojunction-based RRAM to reconfigurable IC

    Publication Year: 2008, Page(s):101 - 105
    Cited by:  Papers (5)  |  Patents (1)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (285 KB)

    A novel reconfigurable architecture, rFPGA, is developed by utilising high-density resistive memory (RRAM) circuits as FPGA components. Different from the existing CMOS-nano hybrid FPGAs that use crossbars, the rFPGA mainly consists of 1T1R RRAM structures (one CMOS transistor is integrated with a two-terminal resistive nanojunction) that can be fabricated using an efficient CMOS-compatible proces... View full abstract»

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Aims & Scope

Micro & Nano Letters offers express publication of short research papers presenting research conducted at the forefront of micro- and nanoscale science, engineering and technology, with at least one dimension ranging from a few tens of micrometres to a few nanometres.

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Meet Our Editors

Editors-in-Chief
Professor Gwo-Bin Vincent Lee
National Tsing-Hua University, Taiwan

Professor Peter Dobson
University of Oxford, UK